Impact of the CNT growth process on gold metallization dedicated to RF interconnect applications

International Journal of Microwave and Wireless Technologies

Volumn 2, Issue 5, 2010, Pages 463-469

  Yap, Chin Chong ^a,b   Tan, Dunlin ^a,b   Brun, Christophe ^a,c   Li, Hong ^b   Teo, Edwin Hang Tong ^a,b   Baillargeat, Dominique ^a   Tay, Beng Kang ^a,b  

^a RESEARCH TECHNO PLAZA   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c UNIVERSITY OF LIMOGES   (France)

Author keywords

Carbon nanotube; Interconnect; Radio frequency

Indexed keywords

BARRIER LAYERS; COPLANAR LINES; CRITICAL PARAMETER; GOLD METALLIZATION; GROWTH PROCESS; HIGH ASPECT RATIO; INTERCONNECT; MECHANICAL AND ELECTRICAL PROPERTIES; METALLIZATIONS; PROBE STATIONS; RADIO FREQUENCIES; RADIO FREQUENCY APPLICATIONS; REACTANT GAS; REFLECTION AND TRANSMISSION; RF INTERCONNECT; S-PARAMETERS MEASUREMENT; SCANNING ELECTRON MICROSCOPE; VECTOR NETWORK ANALYZERS;

ASPECT RATIO; COPLANAR WAVEGUIDES; ELECTRIC NETWORK ANALYSIS; ELECTRIC NETWORK ANALYZERS; ELECTRIC PROPERTIES; GOLD; GOLD COATINGS; GOLD DEPOSITS; MECHANICAL PROPERTIES; METALLIZING; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SCATTERING PARAMETERS;

CARBON NANOTUBES;

EID: 79952819484     PISSN: 17590787     EISSN: 17590795     Source Type: Journal    
DOI: 10.1017/S1759078710000681     Document Type: Article

References (36)

1. Tsai, T. Y.; Lee, C. Y.; Tai, N. H.; Tuan, W. H.: Transfer of patterned vertically aligned carbon nanotubes onto plastic substrates for flexible electronics and field emission devices. Appl. Phys. Lett., 95(2009), 013107-013103. DOI: 10.1063/1.3167775
2. Stevens, R. M.; Nguyen, C. V.; Meyyappan, M.: Carbon nanotube scanning probe for imaging in aqueous environment. IEEE Trans.00 NanoBiosci., 3(2004), 56-60. DOI: 10.1109/TNB.2004.824275
3. Yung, K. P.; Wei, J.; Tay, B. K.: Formation and assembly of carbon nanotube bumps for interconnection applications. Diamond Relat. Mater., 18(2009), 1109-1113. DOI: 10.1016/j.diamond.2009.02.022
4. Kordas, K. et al.: Chip cooling with integrated carbon nanotube microfin architectures. Appl. Phys. Lett., 90(2007), 123105-123103. DOI: 10.1063/1.2714281 (Pubitemid 46482263)
5. Hermann, S.; Pahl, B.; Ecke, R.; Schulz, S. E.; Gessner, T.: Carbon nanotubes for nanoscale low temperature flip chip connections. Microelectron. Eng., 87(2010), 438-442. DOI: 10.1016/j.mee.2009.05.027
6. Shuba, M. V.; Slepyan, G. Y.; Maksimenko, S. A.; Thomsen, C.; Lakhtakia, A.: Theory of multiwall carbon nanotubes as waveguides and antennas in the infrared and the visible regimes. Phys. Rev. B, 79(2009), 155403. DOI: 10.1103/PhysRevB.79.155403
7. Lee, C. Y.; Tsai, H. M.; Chuang, H. J.; Li, S. Y.; Lin, P.; Tseng, T. Y.: Characteristics and electrochemical performance of supercapacitors with manganese oxide-carbon nanotube nanocomposite electrodes. J. Electrochem. Soc., 152(2005), A716-A720. DOI: 10.1149/1.1870793 (Pubitemid 40636195)
8. Wei, B. Q.; Vajtai, R.; Ajayan, P. M.: Reliability and current carrying capacity of carbon nanotubes. Appl. Phys. Lett., 79(2001), 1172-1174. DOI: 10.1063/1.1396632
9. Dijon, J.; Fournier, A.; Szkutnik, P. D.; Okuno, H.; Jayet, C.; Fayolle, M.: Carbon nanotubes for interconnects in future integrated circuits: The challenge of the density. Diamond Relat. Mater., 19(2010), 382-388. DOI: 10.1016/j.diamond.2009.11.017
10. Li, J. et al.: Bottom-up approach for carbon nanotube interconnects. Appl. Phys. Lett., 82(2003), 2491-2493. DOI: 10.1063/1.1566791
11. Kumar, A.; Pushparaj, V. L.; Kar, S.; Nalamasu, O.; Ajayan, P. M.; Baskaran, R.: Contact transfer of aligned carbon nanotube arrays onto conducting substrates. Appl. Phys. Lett., 89(2006), 163120-163123. DOI: 10.1063/1.2356899 (Pubitemid 44601733)
12. Burke, P. J.: Luttinger liquid theory as a model of the gigahertz electrical properties of carbon nanotubes. IEEE Trans. Nanotechnol., 1(2002), 129-144. DOI: 10.1109/TNANO.2002.806823 (Pubitemid 43987426)
13. Burke, P. J.: Corrections to "An RF Circuit Model for Carbon Nanotubes". IEEE Trans. Nanotechnol., 3(2004), 331-331. doi: 10.1109/TNANO.2004.828578
14. Burke, P. J.: AC performance of nanoelectronics: towards a ballistic THz nanotube transistor. Solid-State Electron., 48(2004), 1981-1986. DOI: 10.1016/j.sse.2004.05.044
15. Burke, P. J.; Rutherglen, C.; Yu, Z.: Single-walled carbon nanotubes: applications in high frequency electronics. Int. J. High Speed Electron. Syst., 16(2006), 977-999 (Pubitemid 46806053)
16. Burke, P. J.: An RF circuit model for carbon nanotubes. IEEE Trans. Nanotechnol., 2(2003), 55-58. DOI: 10.1109/TNANO.2003.808503
17. Plombon, J. J.; O'Brien, K. P.; Gstrein, F.; Dubin, V. M.; Jiao, Y.: High-frequency electrical properties of individual and bundled carbon nanotubes. Appl. Phys. Lett., 90(2007), 063106-063103
18. Yu, Z.; Burke, P. J.: Microwave transport in metallic single-walled carbon nanotubes. Nano Lett., 5(2005), 1403-1406. DOI: 10.1021/nl050738k (Pubitemid 41084425)
19. Zhang, M.; Huo, X.; Chan, P. C. H.; Liang, Q.; Tang, Z. K.: Radio-frequency characterization for the single-walled carbon nanotubes. Appl. Phys. Lett., 88(2006), 163109-163103.
20. Close, G. F.; Yasuda, S.; Paul, B.; Fujita, S.; Wong, H. S. P.: A 1 GHz integrated circuit with carbon nanotube interconnects and silicon transistors. Nano Lett., 8(2008), 706-709. DOI: 10.1021/nl0730965 (Pubitemid 351346043)
21. Nessim, G. D. et al.: Low temperature synthesis of vertically aligned carbon nanotubes with electrical contact to metallic substrates enabled by thermal decomposition of the carbon feedstock. Nano Lett., 9(2009), 3398-3405. DOI: 10.1021/nl900675d
22. Wang, B. et al.: Controllable preparation of patterns of aligned carbon nanotubes on metals and metal-coated silicon substrates. J. Mater. Chem., 13(2003), 1124-1126. DOI: 10.1039/b301061a
23. Yung, K. P.; Wei, J.; Wang, Z. F.; Tay, B. K.: Effects of under CNT metallization layers on carbon nanotubes growth. Mod. Phys. Lett. B, 22(2008), 1827-1836.
24. Garćia-Céspedes, J. et al.: Efficient diffusion barrier layers for the catalytic growth of carbon nanotubes on copper substrates. Carbon, 47(2009), 613-621. DOI: 10.1016/j.carbon. 2008.10.045
25. Bertrand, N.; Drevillon, B.; Gheorghiu, A.; Senemaud, C.; Martinu, L.; Klemberg-Sapieha, J. E.: Adhesion improvement of plasmadeposited silica thin films on stainless steel substrate studied by x-ray photoemission spectroscopy and in situ infrared ellipsometry. J. Vacuum Sci. Technol. A: Vacuum Surf. Films, 16(1998), 6-12. doi: 10.1116/1.581013 (Pubitemid 128020197)
26. De los Santos, V. L. et al.: Crystallization and surface morphology of Au/SiO2 thin films following furnace and flame annealing. Surf. Sci., 603(2009), 2978-2985. DOI: 10.1016/j.susc.2009.08.011
27. Wißmann, P.; Finzel, H.-U.: The effect of annealing on the electrical resistivity of thin gold films. Springer Tracts Mod. Phys., 223(2007), 35-52. DOI: 10.1007/3-540-48490-6-4
28. Basa, D.: Plasma treatment studies of MIS devices. Central Eur. J. Phys., 8(2010), 400-407. DOI: 10.2478/s11534-009-0095-8
29. von Arnim, V. L.; Fessmann, J.; Psotta, L.: Plasma treatment of thin gold surfaces for wire bond applications. Surf. Coatings Technol., 116-119 (1999), 517-523. DOI: 10.1016/S0257-8972 (99) 00105-X (Pubitemid 30513678)
30. Cao, A.; Zhang, X.; Xu, C.; Liang, J.; Wu, D.; Wei, B.: Synthesis of well-aligned carbon nanotube network on a gold-patterned quartz substrate. Appl. Surf. Sci., 181(2001), 234-238. DOI: 0.1016/S0169-4332 (01) 00396-8 (Pubitemid 33018332)
31. Takagi, D.; Homma, Y.; Hibino, H.; Suzuki, S.; Kobayashi, Y.: Single-walled carbon nanotube growth from highly activated metal nanoparticles. Nano Lett., 6(2006), 2642-2645. DOI: 10.1021/nl061797 g (Pubitemid 46129551)
32. Bhaviripudi, S. et al.: CVD synthesis of single-walled carbon nanotubes from gold nanoparticle catalysts. J. Am. Chem. Soc., 129(2007), 1516-1517. DOI: 10.1021/ja0673332
33. Zhang, Y.; Li, R.; Liu, H.; Sun, X.; Mérel, P.; Désilets, S.: Integration and characterization of aligned carbon nanotubes on metal/silicon substrates and effects of water. Appl. Surf. Sci., 255(2009), 5003-5008. DOI: 10.1016/j.apsusc.2008.12.053
34. Dresselhausa, M. S.; Dresselhausb, G.; Saitoc, R.; Jorio, A.: Raman spectroscopy of carbon nanotubes. Phys. Rep., 409(2004), 47-99. DOI: 10.1016/j.physrep. 2004.10.006 (Pubitemid 40317386)
35. Sun, X. et al.: The effect of catalysts and underlayer metals on the properties of PECVD-grown carbon nanostructures. Nanotechnology, 21(2010), 045201. DOI: 10.1088/0957-4484/21/4/045201
36. Nessim, G. D.; Acquaviva, D.; Seita, M.; O'Brien, K. P.; Thompson, C. V.: The critical role of the underlayer material and thickness in growing vertically aligned carbon nanotubes and nanofibers on metallic substrates by chemical vapor deposition. Adv. Funct. Mater., 20(2010), 1306-1312. DOI: 10.1002/adfm.200902265