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Volumn 42, Issue 5, 2011, Pages 443-448

Self-consistent charging in dielectric films under defocused electron beam irradiation

Author keywords

02.60.Cb; 61.80.Fe; 73.61.Ng; Dielectric film; Electron beam; Electron transport; Leakage current; Numerical simulation; Space charge; Surface potential

Indexed keywords

02.60.CB; 61.80.FE; 73.61.NG; ELECTRON TRANSPORT; NUMERICAL SIMULATION; SPACE CHARGE;

EID: 79952618526     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micron.2010.12.007     Document Type: Article
Times cited : (22)

References (35)
  • 2
    • 0037207686 scopus 로고    scopus 로고
    • Transient measurement of resist charging during electron beam exposure
    • Bai M., Pease R.F.W., Meisburger W.D. Transient measurement of resist charging during electron beam exposure. J. Vac. Sci. Technol. B 2003, 21:106-111.
    • (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 106-111
    • Bai, M.1    Pease, R.F.W.2    Meisburger, W.D.3
  • 3
    • 0035371120 scopus 로고    scopus 로고
    • Analysis of two methods of measurement of surface potential of insulators in SEM: X-ray spectroscopy methods
    • Belhaj M., Jbara O., Filippov M.N., Rau E.I., Andrianov M.V. Analysis of two methods of measurement of surface potential of insulators in SEM: X-ray spectroscopy methods. Appl. Surf. Sci. 2001, 177:58-65.
    • (2001) Appl. Surf. Sci. , vol.177 , pp. 58-65
    • Belhaj, M.1    Jbara, O.2    Filippov, M.N.3    Rau, E.I.4    Andrianov, M.V.5
  • 4
    • 0030509549 scopus 로고    scopus 로고
    • Electron probe microanalysis of insulating materials: quantification problems and some possible solutions
    • Cazaux J. Electron probe microanalysis of insulating materials: quantification problems and some possible solutions. X-Ray Spectrom. 1996, 25:265-280.
    • (1996) X-Ray Spectrom. , vol.25 , pp. 265-280
    • Cazaux, J.1
  • 5
    • 0742320699 scopus 로고    scopus 로고
    • Scenario for time evolution of insulator charging under various focused electron irradiations
    • Cazaux J. Scenario for time evolution of insulator charging under various focused electron irradiations. J. Appl. Phys. 2004, 95:731-742.
    • (2004) J. Appl. Phys. , vol.95 , pp. 731-742
    • Cazaux, J.1
  • 6
    • 13244260788 scopus 로고    scopus 로고
    • Recent developments and new strategies in scanning electron microscopy
    • Cazaux J. Recent developments and new strategies in scanning electron microscopy. J. Microsc. 2005, 217:16-35.
    • (2005) J. Microsc. , vol.217 , pp. 16-35
    • Cazaux, J.1
  • 7
    • 71849100830 scopus 로고    scopus 로고
    • Secondary electron emission and charging mechanisms in Auger Electron Spectroscopy and related e-beam techniques
    • Cazaux J. Secondary electron emission and charging mechanisms in Auger Electron Spectroscopy and related e-beam techniques. J. Electron Spectrosc. Relat. Phenom. 2010, 176:58-79.
    • (2010) J. Electron Spectrosc. Relat. Phenom. , vol.176 , pp. 58-79
    • Cazaux, J.1
  • 10
    • 2342561300 scopus 로고    scopus 로고
    • Radiation damage in the TEM and SEM
    • Egerton R.F., Li P., Malac M. Radiation damage in the TEM and SEM. Micron 2004, 35:399-409.
    • (2004) Micron , vol.35 , pp. 399-409
    • Egerton, R.F.1    Li, P.2    Malac, M.3
  • 11
    • 43049118263 scopus 로고    scopus 로고
    • An experimental approach for measuring surface potential and second crossover energy in insulators
    • Fakhfakh S., Jbara O., Rondot S., Rau E.I., Fakhfakh Z. An experimental approach for measuring surface potential and second crossover energy in insulators. J. Phys. D: Appl. Phys. 2008, 41:150402.
    • (2008) J. Phys. D: Appl. Phys. , vol.41 , pp. 150402
    • Fakhfakh, S.1    Jbara, O.2    Rondot, S.3    Rau, E.I.4    Fakhfakh, Z.5
  • 12
    • 64549119510 scopus 로고    scopus 로고
    • Study of the charge build up and transport in electron beam irradiated dielectric films
    • Griseri V., Perrin C., Laurent C. Study of the charge build up and transport in electron beam irradiated dielectric films. J. Electrostat. 2009, 67:400-406.
    • (2009) J. Electrostat. , vol.67 , pp. 400-406
    • Griseri, V.1    Perrin, C.2    Laurent, C.3
  • 13
    • 0032878211 scopus 로고    scopus 로고
    • A study of electron beam-induced conductivity in resists
    • Hwu J.J., Joy D.C. A study of electron beam-induced conductivity in resists. Scanning 1999, 21:264-272.
    • (1999) Scanning , vol.21 , pp. 264-272
    • Hwu, J.J.1    Joy, D.C.2
  • 15
    • 0030159407 scopus 로고    scopus 로고
    • Low voltage scanning electron microscopy
    • Joy D.C., Joy C.S. Low voltage scanning electron microscopy. Micron 1996, 27:247-263.
    • (1996) Micron , vol.27 , pp. 247-263
    • Joy, D.C.1    Joy, C.S.2
  • 16
    • 0000381937 scopus 로고
    • A simulation of keV electron scattering in a charged-up specimen
    • Kotera K., Suga H. A simulation of keV electron scattering in a charged-up specimen. J. Appl. Phys. 1988, 63:261-268.
    • (1988) J. Appl. Phys. , vol.63 , pp. 261-268
    • Kotera, K.1    Suga, H.2
  • 17
    • 44849113555 scopus 로고    scopus 로고
    • Negative charging process of a grounded insulating thin film under low-energy electron beam irradiation
    • (in Chinese)
    • Li W.Q., Zhang H.B. Negative charging process of a grounded insulating thin film under low-energy electron beam irradiation. Acta Phys. Sin. 2008, 57:3219-3229. (in Chinese).
    • (2008) Acta Phys. Sin. , vol.57 , pp. 3219-3229
    • Li, W.Q.1    Zhang, H.B.2
  • 18
    • 77649183572 scopus 로고    scopus 로고
    • The positive charging effect of dielectric films irradiated by a focused electron beam
    • Li W.Q., Zhang H.B. The positive charging effect of dielectric films irradiated by a focused electron beam. Appl. Surf. Sci. 2010, 256:3482-3492.
    • (2010) Appl. Surf. Sci. , vol.256 , pp. 3482-3492
    • Li, W.Q.1    Zhang, H.B.2
  • 19
    • 77954384025 scopus 로고    scopus 로고
    • The surface potential of insulating thin films negatively charged by a low-energy focused electron beam
    • Li W.Q., Zhang H.B. The surface potential of insulating thin films negatively charged by a low-energy focused electron beam. Micron 2010, 41:416-422.
    • (2010) Micron , vol.41 , pp. 416-422
    • Li, W.Q.1    Zhang, H.B.2
  • 21
    • 23944432657 scopus 로고    scopus 로고
    • Potential decay experiments for the characterization of electron transport. Modelling and discussion
    • Mady F., Renoud R., Ganachaud J.P., Bigarré J. Potential decay experiments for the characterization of electron transport. Modelling and discussion. Phys. Stat. Solidi B 2005, 242:2089-2106.
    • (2005) Phys. Stat. Solidi B , vol.242 , pp. 2089-2106
    • Mady, F.1    Renoud, R.2    Ganachaud, J.P.3    Bigarré, J.4
  • 22
    • 0037113028 scopus 로고    scopus 로고
    • Quantitative measurement of surface potential and amount of charging on insulator surface under electron beam irradiation
    • Mizuhara Y., Kato J., Nagatomi T., Takai Y., Inoue M. Quantitative measurement of surface potential and amount of charging on insulator surface under electron beam irradiation. J. Appl. Phys. 2002, 92:6128-6133.
    • (2002) J. Appl. Phys. , vol.92 , pp. 6128-6133
    • Mizuhara, Y.1    Kato, J.2    Nagatomi, T.3    Takai, Y.4    Inoue, M.5
  • 23
    • 50349098504 scopus 로고    scopus 로고
    • Dynamic simulation of secondary electron emission and charging up of an insulating material
    • Ohya K., Ini K., Kuwada H., Hayashi T., Saito M. Dynamic simulation of secondary electron emission and charging up of an insulating material. Surf. Coat. Technol. 2008, 202:5310-5313.
    • (2008) Surf. Coat. Technol. , vol.202 , pp. 5310-5313
    • Ohya, K.1    Ini, K.2    Kuwada, H.3    Hayashi, T.4    Saito, M.5
  • 26
    • 0032490492 scopus 로고    scopus 로고
    • Influence on the secondary electron field of the space charge induced in an insulating target by an electron beam
    • Renoud R., Attard C., Ganachaud J.P., Bartholome S., Dubus A. Influence on the secondary electron field of the space charge induced in an insulating target by an electron beam. J. Phys.: Condens. Matter 1998, 10:5821-5832.
    • (1998) J. Phys.: Condens. Matter , vol.10 , pp. 5821-5832
    • Renoud, R.1    Attard, C.2    Ganachaud, J.P.3    Bartholome, S.4    Dubus, A.5
  • 27
    • 0037148290 scopus 로고    scopus 로고
    • Monte Carlo simulation of the charge distribution induced by a high-energy electron beam in an insulating target
    • Renoud R., Mady F., Ganachaud J.P. Monte Carlo simulation of the charge distribution induced by a high-energy electron beam in an insulating target. J. Phys.: Condens. Matter 2002, 14:231-247.
    • (2002) J. Phys.: Condens. Matter , vol.14 , pp. 231-247
    • Renoud, R.1    Mady, F.2    Ganachaud, J.P.3
  • 28
    • 20444489189 scopus 로고    scopus 로고
    • Monte Carlo simulation of the secondary electron yield of an insulating target bombarded by a defocused primary electron beam
    • Renoud R., Mady, Bigarré J., Ganachaud J.P. Monte Carlo simulation of the secondary electron yield of an insulating target bombarded by a defocused primary electron beam. J. Eur. Ceram. Soc. 2005, 25:2805-2808.
    • (2005) J. Eur. Ceram. Soc. , vol.25 , pp. 2805-2808
    • Renoud, R.1    Mady Bigarré, J.2    Ganachaud, J.P.3
  • 29
    • 79952631373 scopus 로고    scopus 로고
    • Secondary electron emission of an insulating target bombarded by a defocused electron beam
    • Renoud R., Askri K., Papin F., Raouadi K., Yangui B. Secondary electron emission of an insulating target bombarded by a defocused electron beam. Phys. Chem. News 2007, 35:1-8.
    • (2007) Phys. Chem. News , vol.35 , pp. 1-8
    • Renoud, R.1    Askri, K.2    Papin, F.3    Raouadi, K.4    Yangui, B.5
  • 30
    • 0001436787 scopus 로고    scopus 로고
    • Charge dynamics in irradiated polymers
    • Sessler G.M. Charge dynamics in irradiated polymers. IEEE Trans. Electr. Insul. 2004, 27:961-973.
    • (2004) IEEE Trans. Electr. Insul. , vol.27 , pp. 961-973
    • Sessler, G.M.1
  • 32
    • 30744436809 scopus 로고    scopus 로고
    • Secondary electron imaging of nonconductors with nanometer resolution
    • Toth M., Knowles W.R., Thiel B.L. Secondary electron imaging of nonconductors with nanometer resolution. Appl. Phys. Lett. 2006, 88:023105.
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 023105
    • Toth, M.1    Knowles, W.R.2    Thiel, B.L.3
  • 34
    • 55049093953 scopus 로고    scopus 로고
    • Analysis of charging phenomena of polymer films on silicon substrates under electron beam irradiation
    • Yasuda M., Morimoto K., Kainuma Y., Kawata H., Hirai Y. Analysis of charging phenomena of polymer films on silicon substrates under electron beam irradiation. Jpn. J. Appl. Phys. 2008, 47:4890-4892.
    • (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 4890-4892
    • Yasuda, M.1    Morimoto, K.2    Kainuma, Y.3    Kawata, H.4    Hirai, Y.5
  • 35
    • 0037395884 scopus 로고    scopus 로고
    • A novel method of determining semiconductor parameters in EBIC and SEBIV modes of SEM
    • Zhu S.Q., Rau E.I., Yang F.H. A novel method of determining semiconductor parameters in EBIC and SEBIV modes of SEM. Semicond. Sci. Technol. 2003, 18:361-366.
    • (2003) Semicond. Sci. Technol. , vol.18 , pp. 361-366
    • Zhu, S.Q.1    Rau, E.I.2    Yang, F.H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.