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Volumn 88, Issue 2, 2006, Pages 1-3

Secondary electron imaging of nonconductors with nanometer resolution

Author keywords

[No Author keywords available]

Indexed keywords

HIGH VACUUM SEM; MAGNETIC IMMERSION; NANOMETER RESOLUTION; SE IMAGING SIGNAL; SECONDARY ELECTRON (SE) IMAGES; SELF-REGULATION;

EID: 30744436809     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2161571     Document Type: Article
Times cited : (34)

References (11)
  • 2
    • 30744455069 scopus 로고    scopus 로고
    • B. L. Thiel, M. Toth, R. Schroemges, H. Scholtz, G. van Veen, and W. R. Knowles (unpublished)
    • B. L. Thiel, M. Toth, R. Schroemges, H. Scholtz, G. van Veen, and W. R. Knowles (unpublished).
  • 3
    • 1242296379 scopus 로고    scopus 로고
    • 0161-0457
    • M. T. Postek and A. E. Vladar, Scanning 0161-0457 26, 11 (2004); M. T. Postek, A. E. Vladar, and M. H. Bennett, J. Microlithogr., Microfabr., Microsyst. 3, 212 (2004).
    • (2004) Scanning , vol.26 , pp. 11
    • Postek, M.T.1    Vladar, A.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.