Dynamic simulation of secondary electron emission and charging up of an insulating material

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5310-5313

  Ohya, K ^a   Inai, K ^a   Kuwada, H ^a   Hayashi, T ^b   Saito, M ^b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

Charging up; Electron beam; Secondary electron emission; SiO2

Indexed keywords

BUILDING MATERIALS; COMPUTER SIMULATION; SECONDARY EMISSION; SILICON COMPOUNDS;

CHARGING UP; DYNAMIC SIMULATIONS; ELECTRON BEAM; ELECTRON BOMBARDMENTS; SECONDARY ELECTRON EMISSION; SECONDARY ELECTRON EMISSIONS; SIO2;

ELECTRON EMISSION;

EID: 50349098504     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.008     Document Type: Article

References (11)

1. Doan S.L. Proc. ISSM (Sept. 2004) 464
2. Saitoh M., Hayashi T., Fujihara K., et al. Proc. SPIE 6152 (2007) 615248
3. Ohya K., and Ishitani T. Appl. Surf. Sci. 237 (2004) 606
4. Nishimura K., Kawata J., and Ohya K. Nucl. Instr. Methods B 164-165 (2000) 903
5. Ashley J.C., and Electron Spectrosc J. Relat. Phenom. 50 (1990) 323
6. Llacer J., and Garwin E.L. J. Appl. Phys. 40 (1969) 2776
7. Fitting H.-J., and Reinhardt J. Phys. Status Solidi, A 88 (1985) 245
8. Ganachaud J.P., Attard C., and Renoud R. Phys. Status Solidi, B 199 (1997) 175
9. Renoud R., Mady F., and Ganachaud J.P. J. Phys., Condens. Matter 14 (2002) 231
10. Schreiber E., and Fitting H.-J. J. Electron Spectrosc. Relat. Phenom. 124 (2002) 25
11. Joy D.C. Scanning 17 (1995) 270 and A Database of Electron-Solid Interactions