Electron beam charging of insulators with surface layer and leakage currents

Journal of Applied Physics

Volumn 103, Issue 6, 2008, Pages

  Cornet, N ^a   Goeuriot, D ^a   Guerret Piecourt C ^b   Juv D ^b   Trheux D ^b   Touzin, M ^c   Fitting, H J ^d  

^a ECOLE DES MINES DE SAINT ETIENNE   (France)

^b LABORATOIRE DE TRIBOLOGIE ET DYNAMIQUE DES SYSTÈMES   (France)

^c UNIV LILLE   (France)

^d UNIVERSITY OF ROSTOCK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DRIFT CHAMBERS; ELECTRON BEAMS; ELECTRON EMISSION; ELECTRON TRAPS; LEAKAGE CURRENTS; SUBSTRATES;

BALLISTIC SECONDARY ELECTRONS; ELECTRON BEAM CHARGING; FLIGHT-DRIFT MODEL; LAYERED INSULATORS;

ELECTRIC INSULATORS;

EID: 41549148725     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2890427     Document Type: Article

References (51)

1. M. G. D. Geers, V. Kouznetsova, and W. A. M. Brekelmans, J. Electron. Packag. JEPAE4 1043-7398 10.1115/1.1939007 127, 255 (2005).
2. R. G. Vitchev, J. J. Pireaux, T. Conard, H. Bender, J. Wolstenholme, and C. Defranoux, Appl. Surf. Sci. ASUSEE 0169-4332 10.1016/j.apsusc.2004.05.135 235, 21 (2004).
3. M. O'Neill, J. Howell, L. Lollar, C. Carrington, N. Suzuki, M. Piszczor, D. Hoppe, M. Eskenazi, D. Aiken, M. Fulton, H. Brandhorst, M. Schuller, and A. J. McDanal, Can. Water Resour. J. CWRJDL 0701-1784 59, 157 (2006).
4. D. C. Ferguson and G. B. Hillard, NASA Reports No. TP-2003-212287, 2003.
5. D. Triantafyllidis, L. Li, and F. H. Stott, Thin Solid Films THSFAP 0040-6090 453-454, 76 (2004).
6. J. M. Elizondo, K. Meredith, and N. Lapetina, IEEE Trans. Plasma Sci. ITPSBD 0093-3813 10.1109/TPS.2002.805370 30, 1955 (2002).
7. L. F. Valandro, A. Della Bona, M. A. Bottino, and M. P. Neisser, J. Prosthet. Dent. JPDEAT 0022-3913 93, 253 (2005).
8. Y. J. Lei and D. Q. Xiao, IEEE Trans. Dielectr. Electr. Insul. ITDIES 1070-9878 10.1109/TDEI.2006.1593406 13, 93 (2006).
9. M. Dubey, I. Gouzman, S. L. Bernasek, and J. Schwartz, Langmuir LANGD5 0743-7463 10.1021/la053445f 22, 4649 (2006).
10. G. Vereecke and P. G. Rouxhet, J. Behav. Health Serv Res. ZZZZZZ 1094-3412 26, 490 (1998).
11. X. Meyza, D. Goeuriot, C. Guerret-Pícourt, D. Tŕheux, and H.-J. Fitting, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1613807 94, 5384 (2003).
12. M. Touzin, D. Goeuriot, C. Guerret-Pícourt, D. Juv́, D. Tŕheux, and H.-J. Fitting, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2201851 99, 114110 (2006).
13. M. Toth, M. R. Phillips, B. L. Thiel, and A. M. Donald, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1448875 91, 4479 (2002).
14. M. Toth, B. L. Thiel, and A. M. Donald, Ultramicroscopy ULTRD6 0304-3991 10.1016/S0304-3991(02)00203-6 94, 71 (2003).
15. L. Malter, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.49.478 49, 478 (1936).
16. A. Melchinger and S. Hofmann, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.360569 78, 6224 (1995).
17. J. Cazaux, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.369239 85, 1137 (1999).
18. E. Vicario, N. Rosenberg, and R. Renoud, Surf. Interface Anal. SIANDQ 0142-2421 10.1002/sia.740220128 22, 115 (1994).
19. J. P. Ganachaud, C. Attard, and R. Renoud, Phys. Status Solidi B PSSBBD 0370-1972 10.1002/1521-3951(199701)199:1<175::AID-PSSB175>3.0.CO;2-# 199, 175 (1997).
20. R. Renoud, F. Mady, and J. P. Ganachaud, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/14/2/310 14, 231 (2002).
21. F. Mady, R. Renoud, C. Attard, J. Bigarŕ, J.-P. Ganachaud, and P. Hourquebie, Eur. Phys. J.: Appl. Phys. EPAPFV 1286-0042 10.1051/epjap:2002074 20, 41 (2002).
22. H.-J. Fitting, Habilitation thesis, University of Rostock 1978.
23. H.-J. Fitting, H. Glaefeke, W. Wild, M. Franke, and W. Müller, Exp. Tech. Phys. (Berlin) EXPPAL 0014-4924 27, 13 (1979).
24. I. A. Glavatskikh, V. S. Kortov, and H.-J. Fitting, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1330242 89, 440 (2001).
25. Th. Hingst, M. Hübner, R. Franz, Ch. Kuhr, and H.-J. Fitting, Microelectron. Eng. MIENEF 0167-9317 10.1016/0167-9317(94)90069-8 24, 181 (1994).
26. H.-J. Fitting and J.-U. Friemann, Phys. Status Solidi A PSSABA 0031-8965 10.1002/pssa.2210690135 69, 349 (1982).
27. H.-J. Fitting and J. Boyde, Phys. Status Solidi A PSSABA 0031-8965 10.1002/pssa.2210750115 75, 137 (1983).
28. E. Schreiber and H.-J. Fitting, J. Electron Spectrosc. Relat. Phenom. JESRAW 0368-2048 10.1016/S0368-2048(01)00368-1 124, 25 (2002).
29. H.-J. Fitting, E. Schreiber, and I. A. Glavatskikh, Microsc. Microanal. MIMIF7 1431-9276 10.1017/S1431927604040735 10, 764 (2004).
30. H.-J. Fitting, Phys. Status Solidi A PSSABA 0031-8965 10.1002/pssa.2210260216 26, 525 (1974).
31. H.-J. Fitting, H. Glaefeke, and W. Wild, Phys. Status Solidi A PSSABA 0031-8965 10.1002/pssa.2210430119 43, 185 (1977).
32. H.-J. Fitting, J. Electron Spectrosc. Relat. Phenom. JESRAW 0368-2048 10.1016/j.elspec.2004.04.003 136, 265 (2004).
33. J. E. Holliday and E. J. Sternglass, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1735348 30, 1428 (1959).
34. A. Y. Vyatskin and U. V. Trunev, Radiotekh. Elektron. (Moscow) RAELA4 0033-8494 9, 1899 (1972).
35. J. R. Young, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.103.292 103, 292 (1956).
36. T. E. Everhart and P. H. Hoff, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1660019 42, 5837 (1971).
37. K. Kanaya and S. Okayama, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/5/1/308 5, 43 (1972).
38. H.-J. Fitting, N. Cornet, R. Salh, C. Guerret-Pícourt, D. Goeuriot, and A. von Czarnowski, J. Electron Spectrosc. Relat. Phenom. JESRAW 0368-2048 159, 46 (2006).
39. H.-J. Fitting, E. Schreiber, C. Kuhr, and A. von Czarnowski, J. Electron Spectrosc. Relat. Phenom. JESRAW 0368-2048 10.1016/S0368-2048(01)00232-8 119, 35 (2001).
40. H.-J. Fitting, H. Glaefeke, W. Wild, and G. Neumann, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/9/17/010 9, 2499 (1976).
41. R. C. Alig and S. Bloom, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.35.1522 35, 1522 (1975).
42. H.-J. Fitting, H. Glaefeke, and W. Wild, Surf. Sci. SUSCAS 0039-6028 10.1016/0039-6028(78)90251-0 75, 267 (1978).
43. J. Frenkel, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.54.647 54, 647 (1938).
44. J. J. O'Dwyer, The Theory of Electrical Conduction and Breakdown in Solid Dielectrics (Clarendon, Oxford, 1973).
45. R. Chen, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1657437 40, 570 (1969).
46. G. Rudlof, J. Becherer, and H. Glaefeke, Phys. Status Solidi A PSSABA 0031-8965 10.1002/pssa.2210520252 52, K137 (1979).
47. H.-J. Fitting and D. Hecht, Phys. Status Solidi A PSSABA 0031-8965 10.1002/pssa.2211080127 108, 265 (1988).
48. D. Hecht and H.-J. Fitting, Exp. Tech. Phys. (Berlin) EXPPAL 0014-4924 39, 185 (1991).
49. M. Touzin, PhD thesis, Ecole Natinal Suṕrieure des Mines de St. ÉtienneFrance, 2005.
50. T. Temga, D. Juv́, D. Treheux, C. Guerret-Pícourt, and C. Jardin, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/j.nimb.2005.11.151 245, 519 (2006).
51. M. Toth and R. Knowles, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2644159 90, 072905 (2007).