Charging and discharging of electron beam resist films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2893-2896

  Bai, M ^a   Pease, R F W ^a   Tanasa, C ^a   McCord, M A ^a   Pickard, D S ^a   Meisburger, D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033266670     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591091     Document Type: Article

References (9)

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