Analysis of two methods of measurement of surface potential of insulators in SEM: Electron spectroscopy and X-ray spectroscopy methods

Applied Surface Science

Volumn 177, Issue 1-2, 2001, Pages 58-65

  Belhaj, M ^a   Jbara, O ^a   Filippov, M N ^b,c   Rau, E I ^b,c   Andrianov, M V ^b,c  

^a UNIVERSITÉ DE REIMS CHAMPAGNE ARDENNE   (France)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

^c INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

Charging; Electron emission; Electron irradiation; Electron spectroscopy; Insulators; X ray spectroscopy

Indexed keywords

ALUMINA; ELECTRIC INSULATORS; ELECTRON IRRADIATION; SCANNING ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

SURFACE POTENTIALS; X-RAY CONTINUOUS RADIATIONS;

SINGLE CRYSTALS;

EID: 0035371120     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00209-4     Document Type: Article

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