Ultradense silicon nanowire arrays produced via top-down planar technology

Microelectronic Engineering

Volumn 88, Issue 6, 2011, Pages 877-881

  Ferri, M ^a   Suriano, F ^a   Roncaglia, A ^a   Solmi, S ^a   Cerofolini, G F ^b   Romano, E ^b   Narducci, D ^b  

^a CNR   (Italy)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

Electrical characteristics; Silicon nanowires; Top down processing

Indexed keywords

BATCH PROCESS; ELECTRICAL CHARACTERISTIC; LINEAR DENSITY; PLANAR TECHNOLOGY; SILICON NANOWIRE ARRAYS; SILICON NANOWIRES; TOP-DOWN PROCESS; TOPDOWN; ULTRADENSE; WIRE ARRAYS;

BATCH DATA PROCESSING; NANOWIRES; POLYSILICON;

ELECTRIC WIRE;

EID: 79952450139     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.11.034     Document Type: Article

References (34)

1. C.M. Lieber MRS Bull. 28 2003 486 491
2. Y.N. Xia, and P.D. Yang Adv. Mater. 15 2003 351 352
3. P.D. Yang MRS Bull. 30 2005 85 91
4. C.M. Lieber, and Z.L. Wang MRS Bull. 32 2007 99 104
5. Y. Huang, and C.M. Lieber Pure Appl. Chem. 76 2004 2051 2068
6. L. Hood, J.R. Heath, M.E. Phelps, and B. Lin Science 306 2004 640 643
7. F. Patolsky, G. Zheng, and C.M. Lieber Nanomedicine 1 2006 51 65
8. E. Stern, J.F. Klemic, D.A. Routenberg, P.N. Wyrembak, D.B. Turner-Evans, A.D. Hamilton, D.A. LaVan, T.M. Fahmy, and M.A. Reed Nature 445 2007 519 522
9. Z.A.K. Durrani, and M.A. Rafiq Microelectron. Eng. 86 2009 456 466
10. V. Schmidt, J.V. Wittemann, and U. Gösele Chem. Rev. 110 2010 361 388
11. Y.-K. Choi, J.S. Lee, J. Zhu, G.A. Somorjai, L.P. Lee, and J. Bokor J. Vac. Sci. Technol. B 21 2003 2951 2955
12. D. Wang, B.A. Sheriff, M. McAlpine, and J.R. Heath Nano Res. 1 2008 9 21
13. J.-P. Colinge, C.-W. Lee, A. Afzalian, N.D. Akhavan, D. Nima, R. Yan, I. Ferain, P. Razavi, B. O'Neill, A. Blake, M. White, A.-M. Kelleher, B. McCarthy, and R. Murphy Nat. Nanotechnol. 5 2010 225 229
14. G.F. Cerofolini, and E. Romano Appl. Phys. A 91 2008 181 210
15. G. Csaba, and P. Lugli IEEE Trans. Nanotechnol. 8 2009 369 374
16. G.F. Cerofolini Appl. Phys. A 86 2007 31 42
17. G.F. Cerofolini Nanoscale Devices 2009 Springer Berlin
18. M.H. Ben Jamaa, G. Cerofolini, G. De Micheli, Y. Leblebici, in: Proceedings of the International Conference on Compilers, Architecture Synthesis for Embedded Systems - CASES 2009, pp. 11-16.
19. A.I. Hochbaum, R. Chen, R. Diaz Delgado, W. Liang, E.C. Garnett, M. Najarian, A. Majumdar, and P. Yang Nature 451 2008 163 167
20. A.I. Boukai, Y. Bunimovich, J. Tahir-Khel, J.-K. Yu, W.A. Goddard III, and J.R. Heath Nature 451 2008 168 171
21. S.Y. Chou, P.R. Krauss, and P.J. Renstrom Science 272 1966 85 87
22. S.Y. Chou, P.R. Krauss, W. Zhang, L.J. Guo, and L. Zhuang J. Vac. Sci. Technol. B 15 1977 2897 2904
23. H.M. Saavedra, T.J. Mullen, P. Zhang, D.C. Dewey, S.A. Claridge, and P. Weiss Rep. Prog. Phys. 73 2010 036501-1 036501-40
24. J.R. Heath Acc. Chem. Res. 41 2008 1609 1617
25. N.A. Melosh, A. Boukai, F. Diana, B. Gerardot, A. Badolato, and J.R. Heath Science 300 2003 12 115
26. D.C. Flanders, and N.N. Efremow J. Vac. Sci. Technol. B 1 1983 1105 1108
27. Y.-K. Choi, J. Zhu, J. Grunes, J. Bokor J, and G.A. Somorjai J. Phys. Chem. B 107 2003 3340 3343
28. G.F. Cerofolini, G. Arena, M. Camalleri, C. Galati, S. Reina, L. Renna, D. Mascolo, and V. Nosik Microelectron. Eng. 81 2005 405 419
29. G.F. Cerofolini, G. Arena, M. Camalleri, C. Galati, S. Reina, L. Renna, and D. Mascolo Nanotechnology 16 2005 1040 1047
30. G.F. Cerofolini, and D. Mascolo Semicond. Sci. Technol. 21 2006 1315 1325
31. G.F. Cerofolini, V. Casuscelli, A. Cimmino A, A. Di Matteo, V. Di Palma, D. Mascolo, E. Romanelli, M.V. Volpe, and E. Romano Semicond. Sci. Technol. 22 2007 1053 1060
32. G.F. Cerofolini, P. Amato, and E. Romano Semicond. Sci. Technol. 23 2008 075020/1 8
33. Y. Zhao, E. Berenschot, H. Jansen, N. Tas, J. Huskens, and M. Elwenspock Nanotechnology 20 2009 315305-1 315305-7
34. G.F. Cerofolini, and G. Ferla J. Nanoparticle Res. 4 2002 185 191