Sublithographic nanofabrication technology for nanocatalysts and DNA chips

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2951-2955

  Choi, Yang Kyu ^a   Lee, Joon Sung ^b   Zhu, Ji ^c   Somorjai, Gabor A ^c   Lee, Luke P ^b   Bokor, Jeffrey ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California at Berkeley   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; DNA; ELECTRON BEAM LITHOGRAPHY; MICROPROCESSOR CHIPS; MOSFET DEVICES; NANOTECHNOLOGY; PARALLEL PROCESSING SYSTEMS; PHOTOLITHOGRAPHY; SILICON WAFERS; ULTRATHIN FILMS;

ITERATIVE SPACER LITHOGRAPHY (ISL); NANOCATALYSTS;

NANOSTRUCTURED MATERIALS;

EID: 0942267534     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1627805     Document Type: Conference Paper

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