A hybrid approach to nanoelectronics

Nanotechnology

Volumn 16, Issue 8, 2005, Pages 1040-1047

  Cerofolini, G F ^a   Arena, G ^a   Camalleri, C M ^a   Galati, C ^a   Reina, S ^a   Renna, L ^a   Mascolo, D ^b  

^a STMICROELECTRONICS   (Italy)

^b AED Innovation and System Engineering   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; ELECTRETS; ELECTRON BEAM LITHOGRAPHY; ELECTRONIC EQUIPMENT; ETCHING; INTEGRATED CIRCUITS; MOSFET DEVICES; SYNCHROTRON RADIATION;

HYBRID APPROACH; MICROELECTRONIC TECHNOLOGY; NANOELECTRONICS; NANOMETERS;

NANOTECHNOLOGY;

EID: 21144454599     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/8/007     Document Type: Article

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