Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering

Sensors and Actuators, A: Physical

Volumn 165, Issue 1, 2011, Pages 26-34

  Trusov, Alexander A ^a   Schofield, Adam R ^a   Shkel, Andrei M ^a  

^a Irvine   (United States)

Author keywords

High Q design; MEMS vibratory gyroscopes; Tuning fork

Indexed keywords

CERAMIC PACKAGE; EXTERNAL SHOCKS; HIGH QUALITY FACTORS; HIGH-Q DESIGN; LOWER FREQUENCIES; MEMS VIBRATORY GYROSCOPE; MICROMACHINED; MODE QUALITY; NEW DESIGN; QUALITY FACTORS; SCALE FACTOR; SPURIOUS MODES; TUNING FORK; ULTRA-HIGH; VACUUM CHAMBERS; VACUUM PACKAGING; VIBRATIONAL MODES;

ACCELERATION; DESIGN; ENERGY DISSIPATION; VACUUM;

GYROSCOPES;

EID: 79951670435     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.01.007     Document Type: Conference Paper

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