An SOI-MEMS tuning fork gyroscope with linearly coupled drive mechanism

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 607-610

  Azgin, K ^a   Temiz, Y ^a   Akin, T ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; TUNING;

ALLAN VARIANCE; BIAS INSTABILITY; COUPLED DRIVES; G-SENSITIVITY; LINEAR COUPLING; LOWER FREQUENCIES; STRUCTURAL MODES; TUNING FORK GYROSCOPES;

MEMS;

EID: 48349144718     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433080     Document Type: Conference Paper

References (6)

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2. J. Bernstein, S. Cho, A. T. King, A. Kourepenis, P. Maciel, and M. Weinberg, "A Micromachined Comb-Drive Tuning Fork Rate Gyroscope," Proc. of IEEE Workshop on Micro Electro Mechanical Systems (MEMS'93), pp.143-148, January 1993.
3. th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS 2001), pp.464-467, 2001.
4. A. Sharma, M.F. Zaman, B. Amini, and F. Ayazi, "A High-Q In-Plane SOI Tuning Fork Device", Proceedings of IEEE Conference on Sensors, pp. 467-470, October 2004.
5. M. W. Putty, "A Micromachined Vibrating Ring Gyroscope", Ph.D. Thesis, Univ. Michigan, March 95.
6. th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), pp. 70-73, Istanbul, Turkey, January 2006.