Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

Sensors and Actuators, A: Physical

Volumn 165, Issue 2, 2011, Pages 221-229

  Muhammad, H B ^a   Oddo, C M ^b   Beccai, L ^b   Recchiuto, C ^b   Anthony, C J ^a   Adams, M J ^a   Carrozza, M C ^b   Hukins, D W L ^a   Ward, M C L ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b SCUOLA SUPERIORE SANT ANNA   (Italy)

Author keywords

Biomimetic; Capacitive sensor; MEMS; Tactile sensor

Indexed keywords

BIO-INSPIRED; CAPACITIVE SENSOR; CORE ELEMENTS; COST-EFFICIENT; LOAD-UNLOAD; LOW NOISE; MICRO-FABRICATION TECHNOLOGY; PROCESS STEPS; READOUT ELECTRONICS; ROBOTIC FINGER; SENSOR RESPONSE; TACTILE SENSORS;

BIOMIMETICS;

SENSORS;

EID: 79951509636     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.10.025     Document Type: Article

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