Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 370-382

  Beccai, Lucia ^a   Roccella, Stefano ^b   Arena, Alberto ^a   Valvo, Francesco ^a   Valdastri, Pietro ^a   Menciassi, Arianna ^a   Carrozza, Maria Chiara ^b   Dario, Paolo ^a,b  

^a Polo sant'Anna Valdera Sc S   (Italy)

^b Polo sant'Anna Valdera Sc S   (Italy)

Author keywords

Biomechanics; Force; Hybrid; Microsensor; Three axial

Indexed keywords

BIOMECHANICS; INTERFACES (COMPUTER); MICROSENSORS; NETWORKS (CIRCUITS); PIEZOELECTRIC DEVICES; RESISTORS;

HYBRID INTEGRATION; HYBRID SILICON SENSORS; PIEZORESISTORS; THREE-AXIAL FORCE SENSOR;

SILICON SENSORS;

EID: 17644369623     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.007     Document Type: Article

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