Integrated MEMS three-dimensional tactile sensor with large force range

Sensors and Actuators, A: Physical

Volumn 80, Issue 2, 2000, Pages 155-162

  Mei, Tao ^a   Li, Wen J ^b   Ge, Yu ^a   Chen, Yong ^a   Ni, Lin ^a   Chan, Ming Ho ^b  

^a INSTITUTE OF INTELLIGENT MACHINES   (China)

^b Dept Mech Automat Eng C   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONTACT SENSORS; FINITE ELEMENT METHOD; FORCE MEASUREMENT; INTEGRATED CIRCUIT LAYOUT; LEARNING SYSTEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NEURAL NETWORKS; OPTIMIZATION; ROBOTICS;

TACTILE IMAGING; TACTILE SENSORS;

MICROSENSORS;

EID: 0033874015     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00261-7     Document Type: Article

References (7)

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