New tactile sensor chip with silicone rubber cover

Sensors and Actuators, A: Physical

Volumn 84, Issue 3, 2000, Pages 236-245

  Leineweber, Michael ^a   Pelz, Georg ^a   Schmidt, Michael ^b   Kappert, Holger ^c   Zimmer, Günter ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b Maidl Tunnelconsultants GmbH and CoKG   (Germany)

^c FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; CAPACITORS; CMOS INTEGRATED CIRCUITS; FORCE MEASUREMENT; MICROMACHINING; RUBBER COATINGS; SILICONES;

HALF SPACE MODELS; PRESSURE SENSITIVE CAPACITORS; SURFACE MICROMACHINING; TACTILE SENSOR CHIPS;

SILICON SENSORS;

EID: 0034275863     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00310-1     Document Type: Article

References (14)

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