A capacitive accelerometer using SDB-SOI structure

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 267-272

  Matsumoto, Yoshinori ^a   Iwakiri, Moritaka ^a   Tanaka, Hidekazu ^b   Ishida, Makoto ^a   Nakamura, Tetsuro ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b Solid State Advance Center   (Japan)

Author keywords

Capacitance voltage converters; Capacitive accelerometers; Damping control; Silicon direct bonding; Silicon on insulator

Indexed keywords

EID: 0011075708     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01154-5     Document Type: Article

References (6)

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4. Airbags boom when IC accelerometer sees 50G, Electronic Design, 8 Aug., 1991.
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