Scanning tunneling microscopy study of the interfacial bonding structures of Ga2O and In2O/In0.53Ga0.47As(0 0 1)

Microelectronic Engineering

Volumn 88, Issue 4, 2011, Pages 377-382

  Shen, Jian ^a,c   Feldwinn, Darby L ^a   Melitz, Wilhelm ^a   Droopad, Ravi ^b   Kummel, Andrew C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b TEXAS STATE UNIVERSITY   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

III V Compound semiconductor; MOSFET; Scanning tunneling microscopy; Semiconductor oxide interface; Surface reconstruction

Indexed keywords

DISORDERED STRUCTURES; EFFUSION CELLS; FLAT TERRACES; HIGH TEMPERATURE; III-V COMPOUND SEMICONDUCTOR; INTERFACIAL BONDING; MONOLAYER COVERAGE; MOSFET; ORDERED ISLANDS; ORDERED STRUCTURES; POST DEPOSITION ANNEALING; RUNNING-IN; SEMICONDUCTOR-OXIDE INTERFACE; STM/STS;

ELECTRONIC STRUCTURE; MONOLAYERS; MOSFET DEVICES; SCANNING; SCANNING TUNNELING MICROSCOPY; SOIL CONSERVATION;

SURFACE RECONSTRUCTION;

EID: 79751537883     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.10.023     Document Type: Conference Paper

References (28)

1. R. Chau, S. Datta, M. Doczy, B. Doyle, J. Kavalieros, and M. Metz IEEE Electron Device Letters 25 6 2004 408
2. R. Chau, S. Datta, M. Doczy, B. Doyle, J. Jin, J. Kavalieros, A. Majumdar, M. Metz, and M. Radosavljevic IEEE Transactions on Nanotechnology 4 2 2005 153
3. M.J. Hale, S.I. Yi, J.Z. Sexton, A.C. Kummel, and M. Passlack Journal of Chemical Physics 119 13 2003 6719
4. W.E. Spicer, P.W. Chye, P.R. Skeath, C.Y. Su, and I. Lindau Journal of Vacuum Science & Technology 16 5 1979 1422
5. M.L. Huang, Y.C. Chang, C.H. Chang, Y.J. Lee, P. Chang, J. Kwo, T.B. Wu, and M. Hong Applied Physics Letters 87 25 2005 252104
6. J.J. Kolodziej, B. Such, and M. Szymonski Physical Review B 71 16 2005 7
7. W. Melitz, J. Shen, S. Lee, J.S. Lee, A.C. Kummel, R. Droopad, and E.T. Yu Journal of Applied Physics 108 2 2010 023711
8. J. Robertson Applied Physics Letters 94 15 2009 152104
9. J. Shen, E.A. Chagarov, D.L. Feldwinn, W. Melitz, N.M. Santagata, A.C. Kummel, R. Droopad, and M. Passlack Journal of Chemical Physics 2010 10.1063/1.3497040
10. G. Binnig, and H. Rohrer Surface Science 126 1-3 1983 236
11. G. Binnig, and H. Rohrer IBM Journal of Research and Development 30 4 1986 355
12. G. Binnig, and H. Rohrer Reviews of Modern Physics 59 3 1987 615
13. G. Binnig, and H. Rohrer Reviews of Modern Physics 71 2 1999 S324
14. G. Binnig, H. Rohrer, C. Gerber, and E. Weibel Physical Review Letters 50 2 1983 120
15. C.J. Chen Introduction to Scanning Tunneling Microscopy 1993 Oxford University Press
16. J. Tersoff, and D.R. Hamann Physical Review Letters 50 25 1983 1998
17. J. Tersoff, and D.R. Hamann Physical Review B 31 2 1985 805
18. R.M. Feenstra Surface Science 603 18 2009 2841
19. R.M. Feenstra, Y. Dong, M.P. Semtsiv, and W.T. Masselink Nanotechnology 18 4 2007 7
20. R.M. Feenstra, and J.A. Stroscio Journal of Vacuum Science & Technology B 5 4 1987 923
21. R.M. Feenstra, J.A. Stroscio, and A.P. Fein Surface Science 181 1-2 1987 295
22. J. Mirecki Millunchick, A. Riposan, B.J. Dall, C. Pearson, and B.G. Orr Surface Science 550 1-3 2004 1
23. P.A. Bone, J.M. Ripalda, G.R. Bell, and T.S. Jones Surface Science 600 5 2006 973
24. J. Shen, J.B. Clemens, E.A. Chagarov, D.L. Feldwinn, W. Melitz, T. Song, S. Bishop, A.C. Kummel, and R. Droopad Surface Science 604 2010 1757
25. P. Kruse, J.G. McLean, and A.C. Kummel Journal of Chemical Physics 113 20 2000 9224
26. T.T. Chiang, and W.E. Spicer Journal of Vacuum Science & Technology A-Vacuum Surfaces and Films 7 3 1989 724
27. M.J. Hale, J.Z. Sexton, D.L. Winn, A.C. Kummel, M. Erbudak, and M. Passlack Journal of Chemical Physics 120 12 2004 5745
28. D.L. Winn, T.J. Grassman, and A.C. Kummel ECS Transactions 11 4 2007 441