Two-step deposition process of piezoelectric ZnO film and its application for film bulk acoustic resonators

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2432-2436

  Park, Sang Hyun ^a   Seo, Byeng Chul ^a   Yoon, Giwan ^a   Park, Hee Dae ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Sang Shin Electric Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; CRYSTAL ORIENTATION; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; SPUTTER DEPOSITION; ZINC OXIDE;

TWO-STEP DEPOSITION;

DIELECTRIC FILMS;

EID: 0034275173     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1287443     Document Type: Article

References (6)

1. K. M. Larkin, G. R. Kline, and T. McCarron, IEEE Trans. Microwave Theory Tech. 43, 2933 (1995).
2. S. V. Krishnaswamy, J. Rosenbaum, S. Howitz, and R. A. Moore, IEEE Ultrasonics Symposium, 1990 (unpublished), p. 529.
3. J. C. Zesch, B. Hadimioglu, B. T. Khuri-Yakub, M. Lim, R. Lujan, J. Ho, S. Akamine, D. Steinmetz, C. F. Quate, and E. G. Rawson, IEEE Ultrasonics Symposium, 1991 (unpublished), p. 445.
4. M. Kadota, T. Kasanami, and M. Minakata, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 41, 479 (1994).
5. N. W. Emanetoglu, S. Liang, C. Gorla, and Y. Lu, IEEE Ultrasonics Symposium, 1997 (unpublished), p. 195.
6. F. C. M. van De Pol, F. R. Blom, and TH. J. A. Popma, Thin Solid Films 204, 349 (1991).