SCOPUS 정보 검색 플랫폼

Volumn 31, Issue 1, 2011, Pages 139-156

Correlation between the electrical and optical properties of an atmospheric pressure plasma during siloxane coating deposition

(5) Twomey, B a Nindrayog, A b Niemi, K b Graham, W G b Dowling, D P a

a UNIVERSITY COLLEGE DUBLIN (Ireland)

b QUEEN'S UNIVERSITY BELFAST (United Kingdom)

Author keywords

Aerosol precursor; Atmospheric pressure plasma; Plasma diagnostics; Thin films

Indexed keywords

ATMOSPHERIC PLASMAS; ATMOSPHERIC PRESSURE PLASMAS; DIELECTRIC BARRIER DISCHARGES; ELECTRICAL AND OPTICAL PROPERTIES; EMISSION INTENSITY; EMISSION MEASUREMENT; GAS TEMPERATURE; HELIUM PLASMAS; HEXAMETHYL DISILOXANE; INPUT POWER; LIQUID PRECURSORS; MULTIPLE DISCHARGES; NANOMETRES; OPERATING CONDITION; OPERATING MODES; OPTICAL BEHAVIOUR; ORGANIC COMPONENTS; PLASMA OPERATIONS; PROCESS PARAMETERS; PSEUDO-GLOW; QUENCHING EFFECT; REEL-TO-REEL DEPOSITION; SILOXANE COATINGS; TIME-RESOLVED;

ATMOSPHERIC AEROSOLS; ATMOSPHERIC PRESSURE; ATMOSPHERICS; COATINGS; ELECTRIC PROPERTIES; EMISSION SPECTROSCOPY; GAS PERMEABLE MEMBRANES; HELIUM; OPTICAL CORRELATION; OPTICAL EMISSION SPECTROSCOPY; OPTICAL PROPERTIES; PLASMA DIAGNOSTICS; PLASMA SOURCES; THIN FILMS; VAPOR DEPOSITION;

PLASMA DEPOSITION;

EID: 79551512489 PISSN: 02724324 EISSN: None Source Type: Journal
DOI: 10.1007/s11090-010-9266-z Document Type: Article

Times cited : (22)

References (47)

1
- 0029657431
- 10.1016/0257-8972(95)02420-4
- H Chatham 1996 Surface Coatings Technol 78 1 10.1016/0257-8972(95)02420-4
- (1996) Surface Coatings Technol , vol.78 , pp. 1
- Chatham, H.¹

2
- 0025830671
- 10.1016/0142-9612(91)90153-2
- HJ Hettlich F Otterbach C Mittermayer R Kaufmann D Klee 1991 Biomaterials 12 521 10.1016/0142-9612(91)90153-2
- (1991) Biomaterials , vol.12 , pp. 521
- Hettlich, H.J.¹ Otterbach, F.² Mittermayer, C.³ Kaufmann, R.⁴ Klee, D.⁵

3
- 79551533452
- Brno Czech Republic
- Mohan J, Murphy N, Ivankovic A, Dowling D (2008) 17th European conference on fracture. Brno, Czech Republic, p 306
- (2008) 17th European Conference on Fracture , pp. 306
- Mohan, J.¹ Murphy, N.² Ivankovic, A.³ Dowling, D.⁴

4
- 79551534930
- U Schmid H Seidel 2006 Sens Actuat A Phys 194 130 131
- (2006) Sens Actuat A Phys , vol.194 , pp. 130-131
- Schmid, U.¹ Seidel, H.²

5
- 0025474980
- 10.1088/0022-3727/23/8/021 1990JPhD.23.1125Y
- T Yokoyama M Kogoma T Moriwaki S Okazaki 1990 J Phys D Appl Phys 23 1125 10.1088/0022-3727/23/8/021 1990JPhD...23.1125Y
- (1990) J Phys D Appl Phys , vol.23 , pp. 1125
- Yokoyama, T.¹ Kogoma, M.² Moriwaki, T.³ Okazaki, S.⁴

6
- 14544308502
- The physics and phenomenology of One Atmosphere Uniform Glow Discharge Plasma (OAUGDP™) reactors for surface treatment applications
- DOI 10.1088/0022-3727/38/4/007
- JR Roth R Jozef D Xin MS Daniel 2005 J Phys D Appl Phys 38 555 10.1088/0022-3727/38/4/007 2005JPhD...38..555R (Pubitemid 40297504)
- (2005) Journal of Physics D: Applied Physics , vol.38 , Issue.4 , pp. 555-567
- Roth, J.R.¹ Rahel, J.² Dai, X.³ Sherman, D.M.⁴

7
- 50249116878
- 10.1109/TPS.2008.924622 2008ITPS.36.968S
- SA Starostin MAM ElSabbagh E Aldea H de Vries M Creatore MCM van de Sanden 2008 IEEE Trans Plasma Sci 36 968 10.1109/TPS.2008.924622 2008ITPS...36..968S
- (2008) IEEE Trans Plasma Sci , vol.36 , pp. 968
- Starostin, S.A.¹ Elsabbagh, M.A.M.² Aldea, E.³ De Vries, H.⁴ Creatore, M.⁵ Van De Sanden, M.C.M.⁶

8
- 0032306447
- 10.1088/0022-3727/31/24/003 1998JPhD.31.3411M
- F Massines G Gouda 1998 J Phys D Appl Phys 31 3411 10.1088/0022-3727/31/ 24/003 1998JPhD...31.3411M
- (1998) J Phys D Appl Phys , vol.31 , pp. 3411
- Massines, F.¹ Gouda, G.²

9
- 1442312066
- 10.1109/TPS.2003.820970 2003ITPS.31.1363R
- I Radu R Bartnikas MR Wertheimer 2003 IEEE Trans Plasma Sci 31 1363 10.1109/TPS.2003.820970 2003ITPS...31.1363R
- (2003) IEEE Trans Plasma Sci , vol.31 , pp. 1363
- Radu, I.¹ Bartnikas, R.² Wertheimer, M.R.³

10
- 0037863044
- 10.1109/TPS.2003.811647 2003ITPS.31.411R
- I Radu R Bartnikas G Czeremuszkin MR Wertheimer 2003 IEEE Trans Plasma Sci 31 411 10.1109/TPS.2003.811647 2003ITPS...31..411R
- (2003) IEEE Trans Plasma Sci , vol.31 , pp. 411
- Radu, I.¹ Bartnikas, R.² Czeremuszkin, G.³ Wertheimer, M.R.⁴

11
- 9944233125
- 10.1088/0963-0252/13/4/005 2004PSST.13.582N
- G Nersisyan WG Graham 2004 Plasma Sources Sci Technol 13 582 10.1088/0963-0252/13/4/005 2004PSST...13..582N
- (2004) Plasma Sources Sci Technol , vol.13 , pp. 582
- Nersisyan, G.¹ Graham, W.G.²

12
- 27744602979
- Influence of the nitrogen-helium mixture ratio on parameters of a self-sustained normal dc atmospheric pressure glow discharge
- DOI 10.1088/0963-0252/14/4/015, PII S0963025205039113
- VI Arkhipenko AA Kirillov LV Simonchik SM Zgirouski 2005 Plasma Sources Sci Technol 14 757 10.1088/0963-0252/14/4/015 2005PSST...14..757A (Pubitemid 41609429)
- (2005) Plasma Sources Science and Technology , vol.14 , Issue.4 , pp. 757-765
- Arkhipenko, V.I.¹ Kirillov, A.A.² Simonchik, L.V.³ Zgirouski, S.M.⁴

13
- 27744592077
- Glow and Townsend dielectric barrier discharge in various atmosphere
- DOI 10.1088/0741-3335/47/12B/S42, PII S0741333505091700
- F Massines N Gherardi N Naude P Segur 2005 Plasma Phys Control Fusion 47 B577 10.1088/0741-3335/47/12B/S42 (Pubitemid 41612055)
- (2005) Plasma Physics and Controlled Fusion , vol.47 , Issue.B12
- Massines, F.¹ Gherardi, N.² Naude, N.³ Segur, P.⁴

14
- 43249126997
- Thermal stability studies of atmospheric plasma deposited siloxane films deposited on Vycor™ glass
- DOI 10.1016/j.surfcoat.2008.03.003, PII S0257897208001680
- A Ramamoorthy M Rahman DA Mooney JM Don MacElroy DP Dowling 2008 Surface Coatings Technol 202 4130 10.1016/j.surfcoat.2008.03.003 (Pubitemid 351650208)
- (2008) Surface and Coatings Technology , vol.202 , Issue.17 , pp. 4130-4136
- Ramamoorthy, A.¹ Rahman, M.² Mooney, D.A.³ Don MacElroy, J.M.⁴ Dowling, D.P.⁵

15
- 29844434768
- Atmospheric pressure plasma liquid deposition - A novel route to barrier coatings
- DOI 10.1002/cvde.200404209
- L O'Neill LA O'Hare SR Leadley AJ Goodwin 2005 Chem Vapor Deposit 11 477 10.1002/cvde.200404209 (Pubitemid 43037358)
- (2005) Chemical Vapor Deposition , vol.11 , Issue.11-12 , pp. 477-479
- O'Neill, L.¹ O'Hare, L.-A.² Leadley, S.R.³ Goodwin, A.J.⁴

16
- 23044487679
- 2 films by an atmospheric pressure line-shaped plasma
- DOI 10.1002/ppap.200400049
- X Zhu F Arefi-Khonsari C Petit-Etienne M Tatoulian 2005 Plasma Process Polym 2 407 10.1002/ppap.200400049 (Pubitemid 41064409)
- (2005) Plasma Processes and Polymers , vol.2 , Issue.5 , pp. 407-413
- Zhu, X.¹ Arefi-Khonsari, F.² Petit-Etienne, C.³ Tatoulian, M.⁴

17
- 29844452291
- Aerosol-assisted plasma deposition of barrier coatings using organic-inorganic sol-gel precursor systems
- DOI 10.1002/cvde.200406345
- D Vangeneugden S Paulussen O Goossens R Rego K Rose 2005 Chem Vapor Deposit 11 491 10.1002/cvde.200406345 (Pubitemid 43037359)
- (2005) Chemical Vapor Deposition , vol.11 , Issue.11-12 , pp. 491-496
- Vangeneugden, D.¹ Paulussen, S.² Goossens, O.³ Rego, R.⁴ Rose, K.⁵

18
- 60049091122
- 10.1002/ppap.200800048
- B Twomey M Rahman G Byrne A Hynes L-A O'Hare L O'Neill D Dowling 2008 Plasma Process Polym 5 737 10.1002/ppap.200800048
- (2008) Plasma Process Polym , vol.5 , pp. 737
- Twomey, B.¹ Rahman, M.² Byrne, G.³ Hynes, A.⁴ O'Hare, L.-A.⁵ O'Neill, L.⁶ Dowling, D.⁷

19
- 29844439371
- 10.1088/0022-3727/28/8/015 1995JPhD.28.1661S
- Y Sawada S Ogawa M Kogoma 1995 J Phys D Appl Phys 28 1661 10.1088/0022-3727/28/8/015 1995JPhD...28.1661S
- (1995) J Phys D Appl Phys , vol.28 , pp. 1661
- Sawada, Y.¹ Ogawa, S.² Kogoma, M.³

20
- 40549110004
- 10.1002/ppap.200731203
- S Starostine E Aldea H de Vries M Creatore MCM van de Sanden 2007 Plasma Process Polym 4 S440 10.1002/ppap.200731203
- (2007) Plasma Process Polym , vol.4 , pp. 440
- Starostine, S.¹ Aldea, E.² De Vries, H.³ Creatore, M.⁴ Van De Sanden, M.C.M.⁵

21
- 0035782988
- Deposition process based on organosilicon precursors in dielectric barrier discharges at atmospheric pressure-A comparison
- DOI 10.1023/A:1014414016164
- A Sonnenfeld TM Tun L Zajíčková KV Kozlov HE Wagner JF Behnke R Hippler 2001 Plasmas Polym 6 237 10.1023/A:1014414016164 (Pubitemid 35405652)
- (2001) Plasmas and Polymers , vol.6 , Issue.4 , pp. 237-266
- Sonnenfeld, A.¹ Tun, T.M.² Zajickova, L.³ Kozlov, K.V.⁴ Wagner, H.-E.⁵ Behnke, J.F.⁶ Hippler, R.⁷

22
- 18744410396
- External circuit system effects on chlorine plasma instabilities
- DOI 10.1049/el:20050424
- AR Ellingboe VJ Law F Soberon F Garcia W Graham 2005 Electron Lett 41 525 10.1049/el:20050424 (Pubitemid 40672624)
- (2005) Electronics Letters , vol.41 , Issue.9 , pp. 525-526
- Ellingboe, A.R.¹ Law, V.J.² Soberon, F.³ Garcia, F.⁴ Graham, W.⁵

23
- 43249098222
- 10.1002/ppap.200731205
- B Twomey D Dowling G Byrne L O'Neill L-A O'Hare 2007 Plasma Processes Polym 4 S450 10.1002/ppap.200731205
- (2007) Plasma Processes Polym , vol.4 , pp. 450
- Twomey, B.¹ Dowling, D.² Byrne, G.³ O'Neill, L.⁴ O'Hare, L.-A.⁵

24
- 0014551211
- 10.1002/app.1969.070130815
- DK Owens RC Wendt 1969 J Appl Polym Sci 13 1741 10.1002/app.1969. 070130815
- (1969) J Appl Polym Sci , vol.13 , pp. 1741
- Owens, D.K.¹ Wendt, R.C.²

25
- 0032074667
- 10.1016/S0032-3861(97)00484-9
- H Hillborg UW Gedde 1998 Polymer 39 1991 10.1016/S0032-3861(97)00484-9
- (1998) Polymer , vol.39 , pp. 1991
- Hillborg, H.¹ Gedde, U.W.²

26
- 72149096818
- 10.1088/0957-0233/20/11/115703 2009MeScT.20k5703T
- J Tynan VJ Law B Twomey AM Hynes S Daniels G Byrne DP Dowling 2009 Meas Sci Technol 20 115703 10.1088/0957-0233/20/11/115703 2009MeScT..20k5703T
- (2009) Meas Sci Technol , vol.20 , pp. 115703
- Tynan, J.¹ Law, V.J.² Twomey, B.³ Hynes, A.M.⁴ Daniels, S.⁵ Byrne, G.⁶ Dowling, D.P.⁷

27
- 67650324671
- 10.1109/TPS.2009.2015226 2009ITPS.37.961T
- B Twomey DP Dowling G Byrne WG Graham LF Schaper D Della Croce A Hynes L O'Neill 2009 IEEE Trans Plasma Sci 37 961 10.1109/TPS.2009.2015226 2009ITPS...37..961T
- (2009) IEEE Trans Plasma Sci , vol.37 , pp. 961
- Twomey, B.¹ Dowling, D.P.² Byrne, G.³ Graham, W.G.⁴ Schaper, L.F.⁵ Della Croce, D.⁶ Hynes, A.⁷ O'Neill, L.⁸

28
- 84903728767
- World Scientific Publishing Company Greece
- Law VJ, O'Connor N, Daniels S, Twomey B, Tynan J, Dowling DP, Byrne G (2009) CHAOS 2008 international conference, Crete. World Scientific Publishing Company, Greece, p 204
- (2009) CHAOS 2008 International Conference, Crete , pp. 204
- Law, V.J.¹ O'Connor, N.² Daniels, S.³ Twomey, B.⁴ Tynan, J.⁵ Dowling, D.P.⁶ Byrne, G.⁷

29
- 33749506076
- Electrical characteristics of pseudoglow discharges in helium under atmospheric pressure
- DOI 10.1088/1009-0630/8/3/12, 12
- X Xu Q Ou S Zhong X Shu Y Meng 2006 Plasma Sci Technol 8 303 10.1088/1009-0630/8/3/12 2006PlST....8..303X (Pubitemid 44523205)
- (2006) Plasma Science and Technology , vol.8 , Issue.3 , pp. 303-306
- Xu, X.¹ Ou, Q.² Zhong, S.³ Shu, X.⁴ Meng, Y.⁵

30
- 79955986419
- Radial structure of a low-frequency atmospheric-pressure glow discharge in helium
- DOI 10.1063/1.1458684
- L Mangolini K Orlov U Kortshagen J Heberlein U Kogelschatz 2002 Appl Phys Lett 80 1722 10.1063/1.1458684 2002ApPhL..80.1722M (Pubitemid 34635873)
- (2002) Applied Physics Letters , vol.80 , Issue.10 , pp. 1722
- Mangolini, L.¹ Orlov, K.² Kortshagen, U.³ Heberlein, J.⁴ Kogelschatz, U.⁵

31
- 0037422652
- 10.1088/0022-3727/36/1/306 2003JPhD.36.39G
- YB Golubovskii VA Maiorov J Behnke JF Behnke 2003 J Phys D Appl Phys 36 39 10.1088/0022-3727/36/1/306 2003JPhD...36...39G
- (2003) J Phys D Appl Phys , vol.36 , pp. 39
- Golubovskii, Y.B.¹ Maiorov, V.A.² Behnke, J.³ Behnke, J.F.⁴

32
- 33645219549
- 10.1016/j.tsf.2005.08.099
- D Wang Y Wang C Liu 2006 Thin Solid Films 506-507 384 10.1016/j.tsf.2005.08.099
- (2006) Thin Solid Films , vol.506-507 , pp. 384
- Wang, D.¹ Wang, Y.² Liu, C.³

33
- 5544234440
- 10.1063/1.93310 1982ApPhL.41.28B
- DG Boyers WA Tiller 1982 Appl Phys Lett 41 28 10.1063/1.93310 1982ApPhL..41...28B
- (1982) Appl Phys Lett , vol.41 , pp. 28
- Boyers, D.G.¹ Tiller, W.A.²

34
- 0037272192
- 10.1109/TPS.2002.804201 2002ITPS.30.1400K
- U Kogelschatz 2002 IEEE Trans Plasma Sci 30 1400 10.1109/TPS.2002.804201 2002ITPS...30.1400K
- (2002) IEEE Trans Plasma Sci , vol.30 , pp. 1400
- Kogelschatz, U.¹

35
- 4544298881
- Surface modification of polyethyleneterephthalate by an atmospheric-pressure plasma source
- DOI 10.1016/j.surfcoat.2004.03.057, PII S0257897204003573
- S Yang MC Gupta 2004 Surf Coatings Technol 187 172 10.1016/j.surfcoat. 2004.03.057 (Pubitemid 39259493)
- (2004) Surface and Coatings Technology , vol.187 , Issue.2-3 , pp. 172-176
- Yang, S.¹ Gupta, M.C.²

36
- 0344690910
- 10.1063/1.443897 1982JChPh.77.817P
- JM Pouvesle A Bouchoule J Stevefelt 1982 J Chem Phys 77 817 10.1063/1.443897 1982JChPh..77..817P
- (1982) J Chem Phys , vol.77 , pp. 817
- Pouvesle, J.M.¹ Bouchoule, A.² Stevefelt, J.³

37
- 0032364505
- 10.1023/A:1021807215831 1998AIPC.426.461Y
- QS Yu HK Yasuda 1998 Plasma Chem Plasma Process 18 461 10.1023/A:1021807215831 1998AIPC..426..461Y
- (1998) Plasma Chem Plasma Process , vol.18 , pp. 461
- Yu, Q.S.¹ Yasuda, H.K.²

38
- 0037760262
- 10.1021/ja00951a012
- GG Hess FW Lampe LH Sommer 1965 J Am Chem Soc 87 5327 10.1021/ja00951a012
- (1965) J Am Chem Soc , vol.87 , pp. 5327
- Hess, G.G.¹ Lampe, F.W.² Sommer, L.H.³

39
- 0036649069
- Density and temperature in an inductively amplified magnetron discharge for titanium deposition
- DOI 10.1116/1.1488948
- A Ricard C Nouvellon S Konstantinidis JP Dauchot M Wautelet M Hecq 2002 J Vacuum Sci Technol A Vacuum Surf Films 20 1488 10.1116/1.1488948 2002JVST...20.1488R (Pubitemid 34882470)
- (2002) Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , vol.20 , Issue.4 , pp. 1488-1491
- Ricard, A.¹ Nouvellon, C.² Konstantinidis, S.³ Dauchot, J.P.⁴ Wautelet, M.⁵ Hecq, M.⁶

40
- 0001615116
- 10.1006/jmsp.1993.1071 1993JMoSp.158.270R
- F Roux F Michaud M Vervloet 1993 J Mol Spectrosc 158 270 10.1006/jmsp.1993.1071 1993JMoSp.158..270R
- (1993) J Mol Spectrosc , vol.158 , pp. 270
- Roux, F.¹ Michaud, F.² Vervloet, M.³

41
- 0005254859
- 10.1086/148802 1966ApJ.145.634K
- I Kovács 1966 Astrophys J 145 634 10.1086/148802 1966ApJ...145..634K
- (1966) Astrophys J , vol.145 , pp. 634
- Kovács, I.¹

42
- 0003740740
- Chapman & Hall London
- Pearse RWB, Gaydon AG (1965) The identification of molecular spectra. Chapman & Hall, London
- (1965) The Identification of Molecular Spectra
- Pearse, R.W.B.¹ Gaydon, A.G.²

43
- 56249128657
- M Goujon T Belmonte G Henrion 2004 Surf Coatings Technol 756 188 189
- (2004) Surf Coatings Technol , vol.756 , pp. 188-189
- Goujon, M.¹ Belmonte, T.² Henrion, G.³

44
- 0041930999
- 10.1016/S0921-5107(02)00749-3
- N Rochat A Chabli F Bertin C Vergnaud P Mur S Petitdidier P Beeson 2003 Mater Sci Eng B 102 16 10.1016/S0921-5107(02)00749-3
- (2003) Mater Sci Eng B , vol.102 , pp. 16
- Rochat, N.¹ Chabli, A.² Bertin, F.³ Vergnaud, C.⁴ Mur, P.⁵ Petitdidier, S.⁶ Beeson, P.⁷

45
- 33750513830
- x (0 < x < 2) structural properties
- DOI 10.1016/j.apsusc.2006.06.017, PII S016943320600849X
- N Tomozieu 2006 Appl Surf Sci 253 376 10.1016/j.apsusc.2006.06.017 2006ApSS..253..376T (Pubitemid 44667123)
- (2006) Applied Surface Science , vol.253 , Issue.SPEC. ISS. 1 , pp. 376-380
- Tomozeiu, N.¹

46
- 38749111157
- A methodology for curve-fitting of the XPS Si 2p core level from thin siloxane coatings
- DOI 10.1002/sia.2634
- L-A O'Hare A Hynes MR Alexander 2007 Surf Interface Anal 39 926 10.1002/sia.2634 (Pubitemid 351181138)
- (2007) Surface and Interface Analysis , vol.39 , Issue.12-13 , pp. 926-936
- O'Hare, L.-A.¹ Hynes, A.² Alexander, M.R.³

47
- 0032491759
- 10.1088/0022-3727/31/1/011 1998JPhD.31.74H
- C Hollenstein AA Howling C Courteille D Magni SM Scholz GMW Kroesen N Simons Wd Zeeuw W Schwarzenbach 1998 J Phys D Appl Phys 31 74 10.1088/0022-3727/31/1/011 1998JPhD...31...74H
- (1998) J Phys D Appl Phys , vol.31 , pp. 74
- Hollenstein, C.¹ Howling, A.A.² Courteille, C.³ Magni, D.⁴ Scholz, S.M.⁵ Kroesen, G.M.W.⁶ Simons, N.⁷ Wd, Z.⁸ Schwarzenbach, W.⁹

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