Infrared analysis of thin layers by attenuated total reflection spectroscopy

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 16-21

  Rochat, N ^a   Chabli, A ^a   Bertin, F ^a   Vergnaud, C ^a   Mur, P ^a   Petitdidier, S ^b   Besson, P ^b  

^a CEA GRENOBLE   (France)

^b ST (ST Crolles)   (France)

Author keywords

Attenuated total reflection (ATR); Infrared spectroscopy; Thin layers

Indexed keywords

INFRARED SPECTROSCOPY; LIGHT ABSORPTION; LIGHT POLARIZATION; LIGHT REFLECTION; SEMICONDUCTING SILICON; SPECTRUM ANALYSIS; SURFACE PROPERTIES;

TOTAL REFLECTION SPECTROSCOPY;

SURFACE STRUCTURE;

EID: 0041930999     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00749-3     Document Type: Conference Paper

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