Formation and expansion phases of an atmospheric pressure glow discharge in a PECVD reactor via fast ICCD imaging

IEEE Transactions on Plasma Science

Volumn 36, Issue 4 PART 1, 2008, Pages 968-969

  Starostin, Sergey A ^a,b   ElSabbagh, Mansour A M ^c   Aldea, Eugen ^d   de Vries, Hindrik ^d   Creatore, Mariadriana ^b   van de Sanden, M C M ^b  

^a MATERIALS INNOVATION INSTITUTE M2I   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c AL AZHAR UNIVERSITY   (Egypt)

^d TRL   (Netherlands)

Author keywords

Argon; Atmospheric pressure (AP); Dielectrics; Discharges; Glow discharges; Ignition; Inductors; Plasma enhanced chemical vapor deposition (PECVD); Plasmas; Surface discharges

Indexed keywords

ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; ATMOSPHERICS; CLIMATOLOGY; COUPLED CIRCUITS; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; GLOW DISCHARGES; METEOROLOGY; PLASMA DEPOSITION; PLASMAS;

ARGON; ATMOSPHERIC PRESSURE (AP); ATMOSPHERIC PRESSURE GLOW; ATMOSPHERIC PRESSURE GLOW DISCHARGE; ATMOSPHERIC PRESSURE PLASMAS; DIELECTRIC-BARRIER DISCHARGES; DIELECTRICS; DISCHARGES; DYNAMIC EVOLUTION; EXPERIMENTAL STUDIES; FILAMENTARY DISCHARGE; ICCD IMAGING; IGNITION; INDUCTORS; LATERAL EXPANSION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); PLASMA SCIENCE; SURFACE DISCHARGES;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 50249116878     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.924622     Document Type: Article

References (5)

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