SCOPUS 정보 검색 플랫폼

Journal of Non-Crystalline Solids

Volumn 357, Issue 3, 2011, Pages 1096-1100

Characteristics of sputtered zinc-oxide films prepared by UBM sputtering for thin film transistors

(1) Park, Yong Seob a

a Kyung Hee University (South Korea)

Author keywords

Crystallinity; Resistivity; Thin film transistor (TFT); Unbalance magnetron sputter; ZnO

Indexed keywords

CRYSTALLINITIES; RESISTIVITY; THIN FILM TRANSISTOR (TFT); UNBALANCE MAGNETRON SPUTTER; ZNO;

ELECTRIC PROPERTIES; FIELD EFFECT TRANSISTORS; GRAIN SIZE AND SHAPE; MAGNETRONS; METALLIC FILMS; OXIDE FILMS; SEMICONDUCTING SILICON COMPOUNDS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; ZINC; ZINC OXIDE;

THIN FILM TRANSISTORS;

EID: 79251598416 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2010.11.035 Document Type: Article

Times cited : (1)

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