Structural and optical properties of sputtered ZnO thin films

Applied Surface Science

Volumn 254, Issue 12, 2008, Pages 3643-3647

  Flickyngerova, S ^a   Shtereva, K ^b   Stenova, V ^c   Hasko, D ^d   Novotny, I ^a   V Tvarozek, ^a   Sutta, P ^c   Vavrinsky, E ^a  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^b UNIVERSITY OF RUSE   (Bulgaria)

^c UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^d INTERNATIONAL LASER CENTER   (Slovakia)

Author keywords

RF diode sputtering; Structural and optical properties; ZnO:Al

Indexed keywords

DEPOSITION; MAGNETRON SPUTTERING; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

HEXAGONAL WURTZITE STRUCTURE; RF DIODE SPUTTERING;

THIN FILMS;

EID: 40849140865     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.10.105     Document Type: Article

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