Scanning thermal microscopy: A nanoprobe technique for studying the thermal properties of nanocomponents

Physica Status Solidi (B) Basic Research

Volumn 248, Issue 2, 2011, Pages 370-374

  Wielgoszewski, Grzegorz ^a   Sulecki, Przemysław ^a   Gotszalk, Teodor ^a   Janus, Paweł ^b   Grabiec, Piotr ^b   Hecker, Michael ^c   Ritz, Yvonne ^d   Zschech, Ehrenfried ^d  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^c GLOBALFOUNDRIES   (Germany)

^d FRAUNHOFER INSTITUTE FOR NON DESTRUCTIVE TESTING   (Germany)

Author keywords

Atomic force microscopy; Scanning thermal microscopy

Indexed keywords

EID: 79251479122     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.201046614     Document Type: Article

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