Novel SThM nanoprobe for thermal properties investigation of micro- and nanoelectronic devices

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1370-1374

  Janus, P ^a   Szmigiel, D ^a   Weisheit, M ^b   Wielgoszewski, G ^c   Ritz, Y ^d   Grabiec, P ^a   Hecker, M ^b   Gotszalk, T ^c   Sulecki, P ^c   Zschech, E ^d  

^a ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^b GLOBALFOUNDRIES   (Germany)

^c WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^d FRAUNHOFER INSTITUTE FOR NON DESTRUCTIVE TESTING   (Germany)

Author keywords

Atomic Force Microscopy; Scanning Thermal Microscopy

Indexed keywords

AFM; DETECTION SYSTEM; HIGH REPRODUCIBILITY; MICRO-CANTILEVERS; MICROMACHINED; NANOELECTRONIC DEVICES; POST PROCESSING; SCANNING THERMAL MICROSCOPY; THERMAL PROPERTIES;

ATOMS; NANOCANTILEVERS; PLATINUM; SCANNING; THERMODYNAMIC PROPERTIES;

ATOMIC FORCE MICROSCOPY;

EID: 76949103578     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.178     Document Type: Article

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