Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Hajjam, Arash ^a   Wilson, James C ^a   Rahafrooz, Amir ^a   Pourkamali, Siavash ^a  

^a University of Denver   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL PARTICLES; AIRBORNE PARTICLE; DEVICE FABRICATIONS; EXPECTED VALUES; HIGH QUALITY FACTORS; LOW FREQUENCY; MASS DENSITIES; MASS SENSITIVITY; MEASUREMENT RESULTS; MICROMECHANICAL RESONATOR; PHYSICAL DIMENSIONS; RESONANT FREQUENCIES; SINGLE CRYSTAL SILICON; SINGLE-MASK PROCESS; SOI SUBSTRATES; TEST SETUPS;

ATMOSPHERIC PRESSURE; FABRICATION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

RESONATORS;

EID: 78649760774     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125019     Document Type: Article

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