Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 707-710

  Hajjam, Arash ^a   Rahafrooz, Amir ^a   Wilson, James C ^a   Pourkamali, Siavash ^a  

^a University of Denver   (United States)

Author keywords

Aerosol particles; Mass sening; MEMS resonator; Piezoresistive; Thermal actuation

Indexed keywords

AEROSOL PARTICLES; AIR QUALITY MONITORING; DEPOSITION SYSTEMS; ENVIRONMENTAL RESEARCHES; MASS MEASUREMENTS; MEMS RESONANT SENSORS; MEMS RESONATORS; MICRO-ELECTRO-MECHANICAL; PARTICLE MASS; PIEZO-RESISTIVE; RESONANCE FREQUENCIES; RESONANT SENSORS; SENSOR SENSITIVITY; SINGLE-MASK; SOI SUBSTRATES; THERMAL ACTUATION; VISCOUS DAMPING;

AIR QUALITY; ATMOSPHERIC AEROSOLS; FABRICATION; MASKS; MICROELECTROMECHANICAL DEVICES; RESONANCE; RESONATORS;

SENSORS;

EID: 77951128481     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398557     Document Type: Conference Paper

References (12)

1. nd Edition, Wiley-Interscience, New York.
2. Bowers, W. D. and Chuan, R. L., "Surface acoustic-wave piezoelectric crystal aerosol mass microbalance," Rev. Sci. Instrum., 60:1297-1302.
3. L. Rodriguez-Pardo, et al, "Sensitivity, noise, and resolution in QCM sensors in liquid media," IEEE Sensors Journal, December 2005.
4. D. S. Ballantine, Acoustic Wave Sensors: Theory, Design, and Physico- Chemical Applications, 1st ed. San Diego, CA: Academic, 1997
5. A. Rahafrooz, A. Hajjam, and S. Pourkamali, "Thermal actuation of high frequency micromechanical resonators," proceedings, IEEE SOI conference, 2009.
6. S. Pourkamali, G. K. Ho and F Ayazi, "Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators," IEEE Transactions on Electron Devices, Vol. 54, No. 8, 2007, pp.2017-2023.
7. F. Ayazi, "High-frequency integrated microelectromechanical resonators and filters," in Advanced Micro and Nanosystems. Weinheim, Germany: Wiley-VCH, 2004, pp. 165-192.
8. C. T. C. Nguyen, "MEMS technology for timing and frequency control," in Proc. Freq. Control Symp. Expo., 2005, pp. 1-11.
9. A. Hierlemann, O. Brand, C. Hagleitner, and H. Baltes, "Microfabrication techniques for chemical/biosensors," Proc. IEEE, vol. 91, no. 6, pp. 839-863, Jun. 2003.
10. D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, and H. Baltes, "Complementarymetal oxide semiconductor cantilever arrays on a single chip: Mass-sensitive detection of volatile organic compounds," Anal. Chem., vol. 74, no. 13, pp. 3084-3095, 2002.
11. J. H. Seo and O. Brand, "High Q-Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment," JMEMS 2008, Vol. 17, issue 2, pp. 483-493.
12. A. Rahafrooz and S. Pourkamali, " Resonant MEMS sensors for detection of aqueous heavy metal ions with sub-ppm resolution," Proceedings, IEEE Electron Devices and Solid-State Circuits Conference, 2008.