High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by mems technology

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 703-706

  Kim, Ji Hong ^a   Hong, Sung Min ^b   Lee, Jang Sub ^b   Moon, Byung Moo ^a   Kim, Kunnyun ^b  

^a Korea University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

Capacitive humidity sensor; Humidity sensor; MEMS; Polyimide

Indexed keywords

BOTTOM ELECTRODES; CAPACITANCE VALUES; CAPACITIVE HUMIDITY SENSOR; CAPACITIVE HUMIDITY SENSORS; CAVITY STRUCTURE; ELECTRODE PASSIVATION; ERROR RATE; FILL FACTOR; HIGH RESISTANCE; HIGH SENSITIVITY; HUMIDITY CONDITIONS; MEMS TECHNOLOGY; NOVEL POLYIMIDES; RESPONSE TIME; SENSING LAYERS; SENSING MATERIAL; VAPOR ABSORPTION;

FABRICATION; HUMIDITY SENSORS; HYSTERESIS; MEMS; MICROELECTROMECHANICAL DEVICES; PASSIVATION; POLYIMIDES; RESPONSE TIME (COMPUTER SYSTEMS); SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; VAPORS;

MOISTURE;

EID: 70349706249     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068676     Document Type: Conference Paper

References (9)

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