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Volumn 19, Issue 11, 2009, Pages

Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; AQUEOUS METAL IONS; ATOMIC LAYER; BEAM RESONATORS; COPPER CONCENTRATION; COPPER IONS; COPPER LAYER; FREQUENCY SHIFT; MASS SENSITIVITY; MICRO-ELECTRO-MECHANICAL; MICROMECHANICAL RESONATOR; RESONANT FREQUENCIES; RESONANT STRUCTURES; SENSITIVE MASS; THIN METAL LAYERS; TRACE AMOUNTS; WATER SAMPLES;

EID: 70350639494     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/11/115003     Document Type: Article
Times cited : (6)

References (11)
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    • Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators - Part I: Concept and fabrication
    • DOI 10.1109/TED.2007.901403
    • Pourkamali S et al 2007 Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, part I: concept and fabrication IEEE Trans. Electron. Devices 54 2017-23 (Pubitemid 47249833)
    • (2007) IEEE Transactions on Electron Devices , vol.54 , Issue.8 , pp. 2017-2023
    • Pourkamali, S.1    Ho, G.K.2    Ayazi, F.3
  • 2
    • 0041886902 scopus 로고    scopus 로고
    • High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100 nm transduction gaps
    • Pourkamali S et al 2003 High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100 nm transduction gaps J. Micro Electro Mech. Syst. 12 487-96
    • (2003) J. Micro Electro Mech. Syst. , vol.12 , Issue.4 , pp. 487-496
    • Pourkamali, S.1    Al, E.2
  • 9
    • 33845582401 scopus 로고    scopus 로고
    • Modelling and measurements of a composite microcantilever beam for chemical sensing applications
    • Voiculescu I R et al 2006 Modelling and measurements of a composite microcantilever beam for chemical sensing applications J. Mech. Eng. Sci.
    • (2006) J. Mech. Eng. Sci.
    • Voiculescu, I.R.1    Al, E.2
  • 10
    • 34547889037 scopus 로고    scopus 로고
    • Low-impedance VHF and UHF capacitive silicon bulk acoustic-wave resonators - Part II: Measurement and characterization
    • DOI 10.1109/TED.2007.901405
    • Pourkamali S, Ho G K and Ayazi F 2007 Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators, part II: measurement and characterization IEEE Trans. Electron. Devices 54 2024-30 (Pubitemid 47249834)
    • (2007) IEEE Transactions on Electron Devices , vol.54 , Issue.8 , pp. 2024-2030
    • Pourkamali, S.1    Ho, G.K.2    Ayazi, F.3
  • 11
    • 29044440700 scopus 로고    scopus 로고
    • Sensitivity, noise, and resolution in QCM sensors in liquid media
    • Rodriguez-Pardo L et al 2005 Sensitivity, noise, and resolution in QCM sensors in liquid media IEEE Sensors J. 5 1251-7
    • (2005) IEEE Sensors J. , vol.5 , Issue.6 , pp. 1251-1257
    • Rodriguez-Pardo, L.1    Al, E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.