Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1216-1220

  Arcamone, Julien ^a   Rius, Gemma ^a   Abadal, Gabriel ^b   Teva, Jordi ^b   Barniol, Nuria ^b   Pérez Murano, Francesc ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Capacitive detection; Distributed mass sensing; Monolithic integration; Nano micromechanical resonators

Indexed keywords

CAPACITANCE; ELECTRIC EXCITATION; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SENSORS;

CAPACITIVE DETECTION; DISTRIBUTED MASS SENSING; MONOLITHIC INTEGRATION; NANO-MICROMECHANICAL RESONATORS;

RESONATORS;

EID: 33646028806     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.177     Document Type: Article

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