UV-LIGA microfabrication of 220 GHz sheet beam amplifier gratings with SU-8 photoresists

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Joye, Colin D ^a   Calame, Jeffrey P ^a   Garven, Morag ^b   Levush, Baruch ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIER CIRCUITS; FREQUENCY REGIMES; MICRO-FABRICATION TECHNIQUES; MILLIMETER WAVE CIRCUITS; SHEET BEAM; SU-8 PHOTORESIST; SU-8 REMOVAL; TRAVELING WAVE AMPLIFIERS; ULTRAVIOLET PHOTOLITHOGRAPHY; UV LIGA;

ELECTROFORMING; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; SURFACE TREATMENT;

PHOTORESISTS;

EID: 78649736162     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125016     Document Type: Article

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