9.5: Microfabrication of a 220 GHz grating for sheet beam amplifiers

2010 IEEE International Vacuum Electronics Conference, IVEC 2010

Volumn , Issue , 2010, Pages 187-188

  Joye, Colin D ^a   Calame, Jeffrey P ^a   Garven, Morag ^a   Park, Doewon ^a   Bass, Robert ^a   Levush, Baruch ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Millimeter wave; Sheet beam; Slow wave amplifier; SU 8; UV LIGA

Indexed keywords

AMPLIFIER CIRCUITS; DEEP REACTIVE ION ETCHING; MICRO-FABRICATION TECHNIQUES; SHEET BEAM; SLOW WAVE; SU-8; ULTRAVIOLET LITHOGRAPHY; UV LIGA;

MICROANALYSIS; MICROFABRICATION; MICROMACHINING; MILLIMETER WAVE DEVICES; MILLIMETER WAVES; VACUUM; VACUUM TECHNOLOGY;

REACTIVE ION ETCHING;

EID: 77954851332     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVELEC.2010.5503539     Document Type: Conference Paper

References (3)

1. J. P. Calame, "High heat flux thermal management of microfabricated upper millimeter-wave vacuum electronic devices," IEEE Int'l Vac. Electron. Conf., pp.50-51, 22-24 April 2008.
2. J. Joe, J. Scharer, J. Booske, and B. McVey, "Wave disperion and growth analysis of low-voltage grating Cherenkov amplifiers," Phys. Plasmas, vol. 1, no. 1, pp. 176-188, 1994.
3. P. M. Dentinger, W. M. Clift, S. H. Goods, "Removal of SU-8 photoresist for thick film applications," Microelect. Engrg., Vol. 61-62, 2002, Pages 993-1000.