Non-destructive and quantitative imaging of a nano-structured microchip by ptychographic hard X-ray scanning microscopy

Journal of Microscopy

Volumn 241, Issue 1, 2011, Pages 9-12

  Schropp, A ^a   Boye, P ^a   Goldschmidt, A ^a   Honig S ^a   Hoppe, R ^a   Patommel, J ^a   Rakete, C ^a   Samberg, D ^a   Stephan, S ^a   Schoder S ^b   Burghammer, M ^b   Schroer, C G ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Hard X ray microscopy; Microelectronics; Nondestructive imaging; Ptychography

Indexed keywords

IMAGE RESOLUTION; MICROELECTRONICS; MICROPROCESSOR CHIPS; NANOSTRUCTURES;

HARD X RAY; HARD X-RAY MICROSCOPY; NANO-STRUCTURED; NON-DESTRUCTIVE IMAGING; PTYCHOGRAPHY; QUANTITATIVE IMAGING; SCANNING MICROSCOPY; SPATIAL RESOLUTION; X RAY MICROSCOPY; X RAY SCANNING;

SIGNAL TO NOISE RATIO;

NANOMATERIAL;

ARTICLE; DIFFRACTION; MICROSCOPY; PRIORITY JOURNAL; PTYCHOGRAPHIC COHERENT DIFFRACTION; SIGNAL NOISE RATIO; X RAY FLUORESCENCE; X RAY SCANNING MICROSCOPY;

EID: 78449307687     PISSN: 00222720     EISSN: 13652818     Source Type: Journal    
DOI: 10.1111/j.1365-2818.2010.03453.x     Document Type: Article

References (23)

1. Abbey, B., Williams, G.J., Pfeifer, M.A., et al (2008) Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm. Appl. Phys. Lett. 93, 214101-1-214101-3.
2. Carmona, A., Cloetens, P., Deves, G., Bohic, S. & Ortega, R. (2008) Nano-imaging of trace metals by synchrotron x-ray fluorescence into dopaminergic single cells and neurite-like processes. J. Anal. Atom. Spectr. 23, 1083-1088.
3. Chu, Y.S., Yi, J.M., De Carlo, F., et al (2008) Hard-x-ray microscopy with fresnel zone plates reaches 40 nm Rayleigh resolution. Appl. Phys. Lett. 92, 103119-1-214101-3.
4. Giewekemeyer, K., Thibault, P., Kalbfleisch, S., Beerlink, A., Kewish, C.M., Dierolf, M., Pfeiffer, F. & Salditt, T. (2010) Quantitative biological imaging by ptychographic x-ray diffraction microscopy. Proc. Natl. Acad. Sci. U.S.A. 107, 529-534.
5. Guizar-Sicairos, M. & Fienup, J.R. (2008) Phase retrieval with transverse translation diversity: a nonlinear optimization approach. Opt. Express 16, 7264-7278.
6. Hanke, M., Dubslaff, M., Schmidbauer, M., et al (2008) Scanning x-ray diffraction with 200 nm spatial resolution. Appl. Phys. Lett. 92, 193109-1-193109-3.
7. Heinonen, O., Siegert, M., Roelofs, A., Petford-Long, A.K., Holt, M., D'Aquila, K. & Li, W. (2010) Correlating structural and resistive changes in Ti:NiO resistive memory elements. Appl. Phys. Lett. 96, 103103-1-103103-3.
8. Kang, H.C., Maser, J., Stephenson, G.B., Liu, C., Conley, R., Macrander, A.T. & Vogt, S. (2006) Nanometer linear focusing of hard x rays by a multilayer Laue lens. Phys. Rev. Lett. 96, 127401-1-127401-4.
9. Kang, H.C., Yan, H., Winarski, R.P., et al (2008) Focusing of hard x-rays to 16 nanometers with a multilayer laue lens. Appl. Phys. Lett. 92, 221114-1-221114-3.
10. Maiden, A.M. & Rodenburg, J.M. (2009) An improved ptychographical phase retrieval algorithm for diffractive imaging. Ultramicroscopy 109, 1256-1262.
11. Mimura, H., Handa, S., Kimura, T., et al (2010) Breaking the 10 nm barrier in hard-X-ray focusing. Nature Physics 6, 122-125.
12. Mimura, H., Yumoto, H., Matsuyama, S., et al (2007) Efficient focusing of hard x-rays to 25 nm by a total reflection mirror. Appl. Phys. Lett. 90, 051903-051903-3.
13. Quitmann, C., David, C., Nolting, F., Pfeiffer, F. & Stampanoni, M., editors (2009) Proceedings of the 9th International Conference on X-ray Microscopy, volume 186 of Journal of Physics: Conference Series. IOP, Bristol.
14. Rodenburg, J.M. & Faulkner, H.M.L. (2004) A phase retrieval algorithm for shifting illumination. Appl. Phys. Lett. 85, 4795-4797.
15. Rodenburg, J.M., Hurst, A.C., Cullis, A.G., et al (2007) Hard-x-ray lensless imaging of extended objects. Phys. Rev. Lett. 98, 034801-1-034801-4.
16. Schroer, C.G., Kurapova, O., Patommel, J., et al (2005) Hard x-ray nanoprobe based on refractive x-ray lenses. Appl. Phys. Lett. 87, 124103-1-124103-3.
17. Schroer, C.G., Boye, P., Feldkamp, J., et al (2008) Coherent x-ray diffraction imaging with nanofocused illumination. Phys. Rev. Lett. 101, 090801-1-090801-4.
18. Schroer, C.G., Boye, P., Feldkamp, J.M., et al (2010) Hard X-ray nanoprobe at beamline P06 at PETRA III. Nucl. Instrum. Meth. A 616, 93-97.
19. Schropp, A., Boye, P., Feldkamp, J.M., et al (2010) Hard x-ray nanobeam characterization by coherent diffraction microscopy. Appl. Phys. Lett. 96, 091102-091102-3.
20. Schropp, A. & Schroer, C.G. (2010) Dose requirements for resolving a given feature in an object by coherent x-ray diffraction imaging. New J. Phys. 12, 035016-1-035016-15.
21. Takahashi, Y., Nishino, Y., Tsutsumi, R., et al (2009) High-resolution diffraction microscopy using the plane-wave field of a nearly diffraction limited focused x-ray beam. Phys. Rev. B 80, 054103-1-054103-5.
22. Thibault, P., Dierolf, M., Menzel, A., Bunk, O., David, C. & Pfeiffer, F. (2008) High-resolution scanning x-ray diffraction microscopy. Science 321, 379-382.
23. Withers, P.J. (2007) Mater. Today 10, 26-34.