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77949403961
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note
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The test pattern consists of a 500 nm-thick nanostructured tantalum layer on a SiC-membrane (model ATN/XRESO-50HC by NTT-AT) and contains finest lines and spaces of 50 nm.
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77949342150
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note
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In this context, the difference map algorithm (Refs.) proves to be less robust compared to the sequential scheme (Ref.).
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22
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77949396519
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note
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The reason that it does not appear as a square is related to linear drifts of the sample.
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43849104622
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