메뉴 건너뛰기




Volumn 57, Issue 11, 2010, Pages 3186-3189

Threshold voltage and mobility extraction of NBTI degradation of poly-Si thin-film transistors

Author keywords

Negative bias temperature instability (NBTI); on the fly (OTF) measurement; polycrystalline silicon (poly Si); thin film transistor (TFT)

Indexed keywords

MOBILITY DEGRADATION; MOBILITY EXTRACTION; NEGATIVE BIAS TEMPERATURE INSTABILITY; ON-THE-FLY; ON-THE-FLY METHODS; POLY-SI THIN-FILM TRANSISTORS; POLYCRYSTALLINE SILICON (POLY-SI); POLYCRYSTALLINE SILICON THIN-FILM TRANSISTOR; REACTION-DIFFUSION MECHANISMS; RECOVERY EFFECTS; THRESHOLD VOLTAGE SHIFTS;

EID: 78049303984     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2010.2068550     Document Type: Article
Times cited : (2)

References (13)
  • 2
    • 0037005587 scopus 로고    scopus 로고
    • Dynamic NBTI of p-MOS transistors and its impact on MOSFET scaling
    • Dec.
    • G. Chen, M. F. Li, C. H. Ang, J. Z. Zheng, and D. L. Kwong, "Dynamic NBTI of p-MOS transistors and its impact on MOSFET scaling," IEEE Electron Device Lett., vol. 23, no. 12, pp. 734-736, Dec. 2002.
    • (2002) IEEE Electron Device Lett. , vol.23 , Issue.12 , pp. 734-736
    • Chen, G.1    Li, M.F.2    Ang, C.H.3    Zheng, J.Z.4    Kwong, D.L.5
  • 3
    • 0041340533 scopus 로고    scopus 로고
    • Negative bias temperature instability: Road to cross in deep submicron silicon semiconductor manufacturing
    • Jul.
    • D. K. Schroder and J. A. Babcock, "Negative bias temperature instability: Road to cross in deep submicron silicon semiconductor manufacturing," J. Appl. Phys., vol. 94, no. 1, pp. 1-18, Jul. 2003.
    • (2003) J. Appl. Phys. , vol.94 , Issue.1 , pp. 1-18
    • Schroder, D.K.1    Babcock, J.A.2
  • 5
    • 43549116826 scopus 로고    scopus 로고
    • Dynamic negative bias temperature instability (NBTI) of low-temperature polycrystalline silicon (LTPS) thin-film transistors
    • May
    • J. C. Liao, Y. K. Fang, C. H. Kao, and C. Y. Cheng, "Dynamic negative bias temperature instability (NBTI) of low-temperature polycrystalline silicon (LTPS) thin-film transistors," IEEE Electron Device Lett., vol. 29, no. 5, pp. 477-479, May 2008.
    • (2008) IEEE Electron Device Lett. , vol.29 , Issue.5 , pp. 477-479
    • Liao, J.C.1    Fang, Y.K.2    Kao, C.H.3    Cheng, C.Y.4
  • 6
    • 34547329570 scopus 로고    scopus 로고
    • Comparison of novel BTI measurements for high-k dielectric MOSFETs
    • R. Choi, D. Heh, C. Y. Kang, C. Young, G. Bersuker, and B. H. Lee, "Comparison of novel BTI measurements for high-k dielectric MOSFETs," in Proc. 8th ICSICT, 2006, pp. 1117-1118.
    • (2006) Proc. 8th ICSICT , pp. 1117-1118
    • Choi, R.1    Heh, D.2    Kang, C.Y.3    Young, C.4    Bersuker, G.5    Lee, B.H.6
  • 7
    • 34548740258 scopus 로고    scopus 로고
    • On the physical mechanism of NBTI in silicon oxynitride p-MOSFETs: Can differences in insulator processing conditions resolve the interface trap generation versus hole trapping controversy?
    • S. Mahapatra, K. Ahmed, D. Varghese, A. E. Islam, G. Gupta, L. Madhav, D. Saha, and M. A. Alam, "On the physical mechanism of NBTI in silicon oxynitride p-MOSFETs: Can differences in insulator processing conditions resolve the interface trap generation versus hole trapping controversy?" in Proc. Int. Reliab. Phys. Symp., 2007, pp. 1-9.
    • (2007) Proc. Int. Reliab. Phys. Symp. , pp. 1-9
    • Mahapatra, S.1    Ahmed, K.2    Varghese, D.3    Islam, A.E.4    Gupta, G.5    Madhav, L.6    Saha, D.7    Alam, M.A.8
  • 9
    • 33748562881 scopus 로고    scopus 로고
    • A simple negative bias temperature instability characterization methodology to minimize the immediate recovery effect during measurement
    • Aug.
    • J. B. Yang, T. P. Chen, S. S. Tan, and L. Chan, "A simple negative bias temperature instability characterization methodology to minimize the immediate recovery effect during measurement," Jpn. J. Appl. Phys., vol. 45, no. 8A, pp. 6137-6140, Aug. 2006.
    • (2006) Jpn. J. Appl. Phys. , vol.45 , Issue.8 A , pp. 6137-6140
    • Yang, J.B.1    Chen, T.P.2    Tan, S.S.3    Chan, L.4
  • 10
    • 30844464359 scopus 로고    scopus 로고
    • The negative bias temperature instability in MOS devices: A review
    • Feb.-Apr.
    • J. H. Stathis and S. Zafar, "The negative bias temperature instability in MOS devices: A review," Microelectron. Reliab., vol. 46, no. 2-4, pp. 270-286, Feb.-Apr. 2006.
    • (2006) Microelectron. Reliab. , vol.46 , Issue.2-4 , pp. 270-286
    • Stathis, J.H.1    Zafar, S.2
  • 12
    • 0028747841 scopus 로고
    • On the universality of inversion layer mobility in Si MOSFETs - Part 1: Effects of substrate impurity concentration
    • Dec.
    • S. I. Takagi, A. Toriumi, M. Iwase, and H. Tango, "On the universality of inversion layer mobility in Si MOSFETs - Part 1: Effects of substrate impurity concentration," IEEE Trans. Electron Devices, vol. 41, no. 12, pp. 2357-2362, Dec. 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , Issue.12 , pp. 2357-2362
    • Takagi, S.I.1    Toriumi, A.2    Iwase, M.3    Tango, H.4
  • 13
    • 67349271701 scopus 로고    scopus 로고
    • An analysis of the NBTI-induced threshold voltage shift evaluated by different techniques
    • May
    • Z. Ji, J. F. Zhang, M. H. Chang, B. Kaczer, and G. Groeseneken, "An analysis of the NBTI-induced threshold voltage shift evaluated by different techniques," IEEE Trans. Electron Devices, vol. 56, no. 5, pp. 1086-1093, May 2009.
    • (2009) IEEE Trans. Electron Devices , vol.56 , Issue.5 , pp. 1086-1093
    • Ji, Z.1    Zhang, J.F.2    Chang, M.H.3    Kaczer, B.4    Groeseneken, G.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.