Film bulk acoustic resonator using high-acoustic-impedance electrodes

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 7 B, 2007, Pages 4642-4646

  Ueda, Masanori ^a   Nishihara, Tokihiro ^a   Taniguchi, Shinji ^a   Yokoyama, Tsuyoshi ^a   Tsutsumi, Jun ^a   Iwaki, Masafumi ^a   Satoh, Yoshio ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Bulk acoustic wave (BAW); Coupling factor (k)2; Film bulk acoustic resonator (FBAR); Mobile communication; Piezoelectric thin film resonator; Q factor; Solidly mounted resonator (SMR); Surface acoustic wave (SAW)

Indexed keywords

ACOUSTIC RESONATORS; MOBILE TELECOMMUNICATION SYSTEMS; PIEZOELECTRIC DEVICES; Q FACTOR MEASUREMENT; THIN FILM DEVICES;

COUPLING FACTORS; FILM BULK ACOUSTIC RESONATORS (FBAR); SOLIDLY MOUNTED RESONATORS (SMR); SURFACE ACOUSTIC WAVE (SAW);

ACOUSTIC BULK WAVE DEVICES;

EID: 34547892651     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.4642     Document Type: Article

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