RF MEMS high-impedance tuneable metamaterials for millimeter-wave beam steering

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 896-899

  Sterner, M ^a   Chicherin, D ^b   Riisenen, A V ^b   Stemme, G ^a   Oberhammer, J ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM-STEERING; FABRICATED DEVICE; FREQUENCY-SELECTIVE; GLASS SUBSTRATES; HIGH IMPEDANCE SURFACE; HIGH-IMPEDANCE SURFACES; MEMS ACTUATORS; MICROWAVE STRUCTURES; MILLIMETER-WAVE BEAMS; MONOCRYSTALLINE SILICON; MULTICOMPONENT; NEW CLASS; PULL-IN VOLTAGE; RESONANCE FREQUENCIES; RF-MEMS; SINGLE CHIPS; SURFACE ELEMENTS;

ELECTRONIC EQUIPMENT; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SURFACES;

EID: 65949096652     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805528     Document Type: Conference Paper

References (9)

1. R. Blundell and C.-y. Tong, "Submillimeter receivers for radio astronomy," Proceedings ofthe IEEE, vol. 80, no. 11, pp. 1702-1720, Nov 1992.
2. C. Chekroun, D. Herrick, Y. M. Michel, R. Pauchard, and P. Vidal, "Radant - New method of electronic scanning," L'Onde Electrique, vol. 59, pp. 89-94, February 1981.
3. D. Sievenpiper, "High-impedance electromagnetic surfaces," Ph.D. dissertation, Dept. Elect. Eng., Univ. of California, Los Angeles, 1999.
4. J. Higgins, H. Xin, A. Sailer, and M. Rosker, "Ka-band waveguide phase shifter using tunable electromagnetic crystal sidewalls," IEEE Trans. Microw. Theory and Techniques, vol. 51, no. 4, pp. 1281-1288, April 2003.
5. D. Sievenpiper, J. Schaffner, B. Loo, G. Tangonan, R. Harold, J. Pikulski, and R. Garcia, "Electronic beam steering using a varactor-tuned impedance surface," IEEE Antennas and Propagation Society International Symposium, vol. 1, pp. 174-177, 2001.
6. L. E. Larson, R. H. Hackett, M. A. Melendes, and R. F. Lohr, "Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits," in IEEE Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1991, pp. 27-30. (Pubitemid 21690276)
7. B. Schoenlinner, A. Abbaspour-Tamijani, L. Kempel, and G. Rebeiz, "Switchable low-loss RF MEMS Kaband frequency-selective surface," IEEE Transactions on Microwave Theory and Techniques, vol. 52, no. 11, pp. 2474-2480, November 2004.
8. D. Chicherin, S. Dudorov, D. Lioubtchenko, V. Ovchinnikov, and A. Raisanen, "Millimetre wave phase shifters based on a metal waveguide with a MEMS-based high-impedance surface," in Proceedings of the 36th European Microwave Conference, September 2006, pp. 372-375.
9. M. Populin, A. Decharat, F. Niklaus, and G. Stemme, "Thermosetting nano-imprint resists: novel materials for adhesive wafer bonding," in Proc. IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), 2007.