Implementation of a micro ball lens on a silicon optical bench using insoluble two-phase liquid immersion technology

Journal of Micromechanics and Microengineering

Volumn 20, Issue 8, 2010, Pages

  Lee, Chih Chun ^a   Hsiao, Sheng Yi ^b   Fang, Weileun ^a,b  

^a Nano Engineering and Micro System Inst   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BACK FOCAL LENGTH; BALL LENS; EFFECTIVE FOCAL LENGTHS; MICRO BALL LENS; MICRO-ELECTRICAL MECHANICAL SYSTEMS; MICROMACHINED; OPTICAL COMPONENTS; RMS WAVEFRONT ERROR; ROOT MEAN SQUARE (RMS) SURFACE ROUGHNESS; SILICON OPTICAL BENCH; TWO-PHASE LIQUID; UV CURABLE POLYMER;

CURING; LIQUIDS; MICROLENSES; POLYMERS; SPHERES; SURFACE ROUGHNESS;

OPTICAL INSTRUMENTS;

EID: 77957805805     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/8/085015     Document Type: Article

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