A simple method for microlens fabrication by the modified LIGA process

Journal of Micromechanics and Microengineering

Volumn 12, Issue 3, 2002, Pages 334-340

  Lee, Sung Keun ^a   Lee, Kwang Cheol ^a   Lee, Seung S ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS TRANSITION; HEAT TREATMENT; MOLECULAR WEIGHT; POLYMETHYL METHACRYLATES; SURFACE ROUGHNESS; SURFACE TENSION; X RAYS;

MICROLENS ARRAYS;

MICROLENSES;

EID: 0036572964     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/3/321     Document Type: Article

References (7)

1. Production of separation nozzle systems for uranium enrichment by a combination of x-ray lithography and galvanoplastics
2. Fabrication and characterization of microlenses realized by a modified LIGA process
3. Out-of-plane refractive microlens fabricated by surface micromachining
4. Parallel optical interconnection using self-adjusting microlenses on injection molded ferrules made by LIGA technique
5. Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding
6. Resist dissolution rate and inclined-wall structures in deep x-ray lithography