Rib-reinforced micromachined beam and its applications

Journal of Micromechanics and Microengineering

Volumn 10, Issue 1, 2000, Pages 93-99

  Lin, Hung Yi ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING STRENGTH; CANTILEVER BEAMS; STIFFNESS; THIN FILMS;

RIB-REINFORCED MICROMACHINED BEAMS; THIN-FILM MICROMACHINED STRUCTURES;

MICROMACHINING;

EID: 0033893264     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/1/313     Document Type: Article

References (15)

1. Fang W and Wickert J A 1996 Determining mean and gradient residual stress in thin-films using micromachined cantilevers J. Micromech. Microeng. 6 301-9
2. Guckel H, Burns D, Rutigliano C, Lovell E and Choi B 1992 Diagnostic microstructures for the measurement of intrinsic strain in thin-films J. Micromech. Microeng. 2 86-95
3. Hsieh J and Fang W 1998 Fabrication of micro torsional actuator using surface plus bulk micromachining processes SPIE Micromachining Microfabrication 3514 368-76
4. Conant R A, Hagelin P M, Krishnamoorthy U, Solgaard O, Lau K Y and Muller RS 1999 A raster-scanning full-motion video display using polysilicon micromachined mirror Transducers'99 (Sendai, Japan, June 1999) pp 376-9
5. Claassen W A P, Valkenburg W G J N, Willemsen M F C and van de Wijgert W M 1985 Influence of deposition temperature, gas pressure, gas phase composition, and RF frequency on composition and mechanical stress of plasma silicon nitride layers J. Electrochem. Soc. 132 893-8
6. Zhang X, Zhang T Y, Wong M and Zohar Y 1998 Residual-stress relaxation in polysilicon thin-films by high-temperature rapid thermal annealing Sensors Actuators A 64 109-15
7. Ried R P, Kim E S, Hong D M and Muller R S 1992 Residual-stress compensation in clamped-clamped micromachined plates Micromechanical Systems ASME Winter Annul Meeting (Anaheim, CA, November 1992) pp 23-32
8. Chou B C S, Shie J-S and Chen C-N 1997 Fabrication of low-stress dielectric thin-film for microsensor applications IEEE Electron Device Lett. 18 599-601
9. 4 sandwich system Thin Solid Films 188 27-33
10. Jerman J H, Clift D J and Mallinson S R 1991 A miniature Fabry-Perot interferometer with a corrugated silicon diaphragms support Sensors Actuators A 29 151-8
11. Lee S S, Ried R P and Write R M 1996 Piezoelectric cantilever microphone and microspeaker J. Microelectromech. Syst. 5 238-42
12. Hwang K-H, Koo W-K and Kim S-G 1998 High brightness projection display system based on the thin-film actuated mirror array (TFAMA) SPIE Micromachining Microfabrication 3513 171-80
13. MacDonald N C 1996 SCREAM microelectromechanical systems Microelectron. Eng. 32 49-73
14. Beer F P and Johnston E R Jr 1992 Mechanics of Materials (New York: McGraw-Hill)
15. Cook R D and Young W C 1985 Advanced Mechanics of Materials (New York: Macmillan)