Micro-optic reflection and transmission interferometer for complete microlens characterization

Measurement Science and Technology

Volumn 20, Issue 2, 2009, Pages

  Gomez, Virginia ^a   Ghim, Young Sik ^b   Ottevaere, Heidi ^a   Gardner, Neil ^c   Bergner, Brent ^b   Medicus, Kate ^d   Davies, Angela ^b   Thienpont, Hugo ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^c ASML US Inc   (United States)

^d Mitutoyo Research Center Europe BV   (Netherlands)

Author keywords

Interferometry; Microlens characterization; Phase shifting

Indexed keywords

CHARACTERIZATION; INSTRUMENT ERRORS; INTERFEROMETERS; INTERFEROMETRY; OPTICAL DESIGN; PHASE SHIFT;

COMMERCIAL INSTRUMENTS; FABRICATION TECHNOLOGIES; MICRO-LENS; PHASE-SHIFTING; QUANTITATIVE CHARACTERIZATION; REFLECTION AND TRANSMISSION; REFRACTIVE MICROLENSE; TRANSMITTED WAVEFRONTS;

MICROLENSES;

EID: 63849083644     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/2/025901     Document Type: Article

References (13)

1. Ottevaere H, Cox R, Herzig H P, Miyashita T, Naessens K, Taghizadeh M, Völkel R, Woo H J and Thienpont H 2006 Comparing glass and plastic refractive microlenses fabricated with different technologies J. Opt. A: Pure Appl. Opt. 8 S407-29
2. Sinzinger S and Jahns J 2003 Microoptics (Berlin: Wiley-VCH) 2 (revised and enlarged edition)
3. Miyashita T 2007 Standardization for microlenses and microlens arrays Japan. J. Appl. Phys. 46 5391-6
4. Ottevaere H and Thienpont H 2004 Encyclopedia of Modern Optics, Refractive Optical Microlenses: An Introduction to Nomenclature and Characterization Techniques vol 4 (Oxford: Elsevier) pp 21-43
5. Reichelt S and Zappe H 2005 Combined Twyman-Green and Mach-Zehnder interferometer for microlens testing Appl. Opt. 44 5786-92
6. Schwider J, Lindlein N, Schreiner R, Lamprecht J, Leuchs G, Pfund J and Beyerlein M 2002 Optikprüfung vonrefraktiven Mikrolinsen Tech. Mess. 69 467
7. Schwider J and Falkenstörfer O 1995 Twyman-Green interferometer for testing microspheres Opt. Eng. 34 2972-5
8. Malacara D 1992 Optical Shop Testing (New York: Wiley)
9. Gardner N and Davies A 2006 Self-calibration for microrefractive lens measurements Opt. Eng. 45 033603
10. Bergner B and Davies A 2007 Self-calibration for transmitted wavefront measurements Appl. Opt. 46 18-24
11. Gardner N 2007 Precision geometric metrology of refractive micro-lenses PhD Dissertation University of North Carolina at Charlotte
12. Davies A and Schmitz T L 2005 Correcting for stage error motions in radius measurements Appl. Opt. 44 5884-93
13. Bobroff N 1993 Recent advances in displacement measuring interferometry Meas. Sci. Technol. 4 907-26