Semiconductor Microlenses Fabricated by One-Step Wet Etching

IEEE Photonics Technology Letters

Volumn 12, Issue 5, 2000, Pages 507-509

  Kim, Yu Sik ^a   Kim, Jaehoon ^a   Choe, Joong Seon ^a   Roh, Young Geun ^a   Jeon, Heonsu ^a   Woo, J C ^b  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Chemical etching; Diffusion process; Microlens; Refraction; Semiconductor materials

Indexed keywords

EID: 0000697895     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.841268     Document Type: Article

References (9)

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