Micro-optics metrology using advanced interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5856 PART I, Issue , 2005, Pages 437-446

  Reichelt, Stephan ^a   Bieber, Alexander ^a   Aatz, Bernd ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Interferometry; Micro optics; Optical testing

Indexed keywords

INTERFEROMETRY; LENSES; MICROSCOPIC EXAMINATION; OPTICAL TESTING; SPURIOUS SIGNAL NOISE;

FRESNEL DIFFRACTION; MACH-ZEHNDER / TWYMAN-GREEN HYBRIDE INTERFEROMETER; MICROSCOPIC SCALE; SURFACE FIGURE ERROR;

MICROOPTICS;

EID: 28844447015     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.612584     Document Type: Conference Paper

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