Design and characterization of single-layer step-bridge structure for out-of-plane thermal actuator

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 70-77

  Chen, Wen Chih ^a   Yeh, Po I ^a   Hu, Chih Fan ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Buckling; Microelectromechanical systems (MEMS); Step bridge; Thermal actuator

Indexed keywords

BUCKLING; DEFLECTION (STRUCTURES); DELAMINATION; JOULE HEATING; MACHINING; MEMS; STRUCTURAL DESIGN;

STEP-BRIDGE STRUCTURE DESIGN; THERMAL ACTUATOR;

ACTUATORS;

EID: 40449121004     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.906761     Document Type: Article

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