|
|
Volumn 39, Issue 6, 2001, Pages 465-468
|
|
Quartz strip resonators as a temperature sensor
|
|
Author keywords
Quartz strip resonator; Temperature sensor
|
|
Indexed keywords
ETCHING;
NATURAL FREQUENCIES;
QUARTZ;
SENSORS;
QUARTZ STRIP RESONATORS;
TEMPERATURE SENSORS;
ACOUSTIC RESONATORS;
SILICON DIOXIDE;
ARTICLE;
TEMPERATURE;
VIBRATION;
QUARTZ;
TEMPERATURE;
VIBRATION;
|
|
EID: 0035471034
PISSN: 0041624X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0041-624X(01)00074-9 Document Type: Article |
|
Times cited : (14)
|
|
References (5)
|
