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Volumn 14, Issue 1, 2008, Pages 135-141

Erratum: A comprehensive model to study nonlinear behavior of multilayered micro beam switches (Microsystem Technologies DOI: 10.1007/s00542-007-0398-x);A comprehensive model to study nonlinear behavior of multilayered micro beam switches

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; FINITE DIFFERENCE METHOD; NONLINEAR SYSTEMS; OPTIMIZATION; SWITCHING SYSTEMS;

EID: 34547838680     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0404-3     Document Type: Erratum
Times cited : (24)

References (14)
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  • 2
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    • Osterberg PM, Senturia SD (1997) M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures. J Microelectromech System 6:107-118
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    • Osterberg, P.M.1    Senturia, S.D.2
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    • A methodology and model for the pull-in parameters of electrostatic actuators
    • Nemirovsky Y (2001) A methodology and model for the pull-in parameters of electrostatic actuators. J Microelectromech System 10:601-615
    • (2001) J Microelectromech System , vol.10 , pp. 601-615
    • Nemirovsky, Y.1
  • 5
    • 33744519012 scopus 로고    scopus 로고
    • Some design considerations on the electrostatically actuated fixed-fixed end type MEMS switches
    • Sadeghian H, Rezazadeh Gh (2006a) Some design considerations on the electrostatically actuated fixed-fixed end type MEMS switches. J Phys Conf Ser 34:174-179
    • (2006) J Phys Conf ser , vol.34 , pp. 174-179
    • Sadeghian, H.1    Gh, R.2
  • 6
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    • The influence of stress gradient on the pull-in phenomena of microelectromechanical switches
    • Sadeghian H, Rezazadeh Gh (2006b) The influence of Stress gradient on the pull-in phenomena of microelectromechanical switches. J Phys Conf Ser 34:1117-1122
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    • Sadeghian, H.1    Gh, R.2
  • 7
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    • Pull-in voltage of fixed-fixed end type MEMS switches with variative electrostatic area
    • 4
    • Sadeghian H, Rezazadeh Gh, Malekpour E, Shafipour A (2006) Pull-in voltage of fixed-fixed end type MEMS switches with variative electrostatic area. Sens Transducers 66(4):526-533
    • (2006) Sens Transducers , vol.66 , pp. 526-533
    • Sadeghian, H.1    Gh, R.2    Malekpour, E.3    Shafipour, A.4
  • 8
    • 0006360186 scopus 로고    scopus 로고
    • Effects of phosphorus on stress of multi-stacked polysilicon film and single crystalline silicon
    • Lee CS, Lee JH, Choi CA, No K, Wee DM (1999) Effects of phosphorus on stress of multi-stacked polysilicon film and single crystalline silicon. J Micromech Microeng 9:252-263
    • (1999) J Micromech Microeng , vol.9 , pp. 252-263
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  • 10
    • 0035280569 scopus 로고    scopus 로고
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    • Park JY, Kim GH, Chung KW, Bu JU (2001) Monolithically integrated micromachined RF MEMS capacitive switches. Sens Actuators A 2001(89):88-94
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  • 11
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    • 2
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.