Surface contamination-induced resonance frequency shift of cantilevers

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 400-403

  Sadeghian, Hamed ^a   Yang, Chung Kai ^a   Gavan, Khashayar Babaei ^b   Goosen, Hans ^a   Van Der Drift, Emile ^b   Van Der Zant, Here ^b   French, Paddy J ^a   Bossche, Andre ^a   Van Keulen, Fred ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Adsorption; Nanocantilever; NEMS; Quality factor; Resonancefrequency; Single crystalline silicon

Indexed keywords

AIR CONDITIONS; AMBIENT GAS; ENVIRONMENTAL EFFECTS; EQUIVALENT MASS; IN-VACUUM; LOW VACUUM; MASS SENSING; MASS SENSITIVITY; MASS SENSOR; NANO-ELECTROMECHANICAL; QUALITY FACTOR; RESONANCE FREQUENCIES; RESONANCE FREQUENCY SHIFT; RESONANCEFREQUENCY; SINGLE CRYSTALLINE SILICON; SURFACE CONTAMINATIONS;

ADSORPTION; CONTAMINATION; CRYSTALLINE MATERIALS; FREQUENCY SHIFT KEYING; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; VACUUM;

NANOCANTILEVERS;

EID: 70349656063     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068604     Document Type: Conference Paper

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