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Thin Solid Films

Volumn 518, Issue 24, 2010, Pages 7249-7252

Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

(5) Tsarfati, T a Van De Kruijs, R W E a Zoethout, E a Louis, E a Bijkerk, F a,b

a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN (Netherlands)

b UNIVERSITY OF TWENTE (Netherlands)

Author keywords

GIXR; Lithography; Multilayer; TEM; X FEL; XPS

Indexed keywords

ADLAYERS; CHEMICAL DIFFUSION; GIXR; INTERLAYER FORMATION; MAGNETO-OPTICAL; MULTILAYER OPTICS; OPTICAL CONTRAST; OPTICAL INTERFACES; SURFACTANT MEDIATED GROWTH; TEM; THIN LAYERS; X-FEL; X-RAY MULTILAYER OPTICS; XPS;

MULTILAYERS; OPTICAL PROPERTIES; SURFACE ACTIVE AGENTS; X RAY PHOTOELECTRON SPECTROSCOPY;

OPTICAL MULTILAYERS;

EID: 77956872572 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.04.088 Document Type: Conference Paper

Times cited : (30)

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