-
1
-
-
0034768869
-
-
L.E. Klebanoff, M.E. Malinowski, P.A. Grunow, W.M. Clift, C. Steinhaus, A.H. Leung, S.J. Haney, in: Proceedings of SPIE 4343, Emerging Lithographic Technologies V, Elizabeth A. Dobisz, 2001, p. 342.
-
(2001)
Proceedings of SPIE 4343, Emerging Lithographic Technologies V, Elizabeth A. Dobisz
, pp. 342
-
-
Klebanoff, L.E.1
Malinowski, M.E.2
Grunow, P.A.3
Clift, W.M.4
Steinhaus, C.5
Leung, A.H.6
Haney, S.J.7
-
3
-
-
0028322842
-
-
Louis E., Voorma H.-J., Koster N.B., Shmaenok L., Bijkerk F., Schlatmann R., Verhoeven J., Platonov Yu.Ya., van Dorssen G.E., and Padmore H.A. Microelectron. Eng. 23 (1994) 215
-
(1994)
Microelectron. Eng.
, vol.23
, pp. 215
-
-
Louis, E.1
Voorma, H.-J.2
Koster, N.B.3
Shmaenok, L.4
Bijkerk, F.5
Schlatmann, R.6
Verhoeven, J.7
Platonov, Yu.Ya.8
van Dorssen, G.E.9
Padmore, H.A.10
-
4
-
-
62749181998
-
-
R.W.E. van de Kruijs, E. Louis, A.E. Yakshin, P. Suter, E. Zoethout, F. Bijkerk, S. Müllender, H. Enkisch, H. Trenkler, M. Wedowski, M. Weiss, B. Mertens, B. Wolschrijn, R. Jansen, A. Duisterwinkel, A. van de Runstraat, R. Klein, S. Plo{combining double acute accent}ger, F. Scholze, Poster 122, in: Proceedings of the Second International EUV Lithography Symposium, Antwerp, 2003.
-
R.W.E. van de Kruijs, E. Louis, A.E. Yakshin, P. Suter, E. Zoethout, F. Bijkerk, S. Müllender, H. Enkisch, H. Trenkler, M. Wedowski, M. Weiss, B. Mertens, B. Wolschrijn, R. Jansen, A. Duisterwinkel, A. van de Runstraat, R. Klein, S. Plo{combining double acute accent}ger, F. Scholze, Poster 122, in: Proceedings of the Second International EUV Lithography Symposium, Antwerp, 2003.
-
-
-
-
13
-
-
0004065549
-
-
North-Holland, Amsterdam
-
de Boer F.R., Boom R., Mattens W.C.M., Miedema A.R., and Niessen A.K. Cohesion in Metals: Transition Metal Alloys (1988), North-Holland, Amsterdam
-
(1988)
Cohesion in Metals: Transition Metal Alloys
-
-
de Boer, F.R.1
Boom, R.2
Mattens, W.C.M.3
Miedema, A.R.4
Niessen, A.K.5
-
19
-
-
62749097509
-
-
San Diego, California
-
Bâjt S., Alameda J., Barbee T., Clifi M., Folta J.A., Kauffman B., and Spiller E. Soft X-Ray and Extreme Ultra-Violet Imaging Systems 11 (2001), San Diego, California
-
(2001)
Soft X-Ray and Extreme Ultra-Violet Imaging Systems 11
-
-
Bâjt, S.1
Alameda, J.2
Barbee, T.3
Clifi, M.4
Folta, J.A.5
Kauffman, B.6
Spiller, E.7
-
20
-
-
62749179177
-
-
A.E. Yakshin, E. Louis, E.L.G. Maas, F. Bijkerk, R. Klein, F. Scholze, P.C. Zalm, F. Stietz, M. Wedowski, S. Muellender, B. Mertens, H. Meiling, ASET/SEMATECH Workshop on EUV Lithography, Matsue, 2001.
-
(2001)
ASET/SEMATECH Workshop on EUV Lithography, Matsue
-
-
Yakshin, A.E.1
Louis, E.2
Maas, E.L.G.3
Bijkerk, F.4
Klein, R.5
Scholze, F.6
Zalm, P.C.7
Stietz, F.8
Wedowski, M.9
Muellender, S.10
Mertens, B.11
Meiling, H.12
-
21
-
-
62749207296
-
-
B.M. Mertens, N. Koster, R. Jansen, A. van de Runstraat, H. Werij, F. Stietz, M. Wedowski, H. Meiling, R. Klein, R. Thornagel, F. Scholze, G. Ulm, R. Kurt, P. Zalm, E. Louis, A. Yakshin, ASET/SEMATECH Workshop on EUV Lithography, Matsue, 2001.
-
(2001)
ASET/SEMATECH Workshop on EUV Lithography, Matsue
-
-
Mertens, B.M.1
Koster, N.2
Jansen, R.3
van de Runstraat, A.4
Werij, H.5
Stietz, F.6
Wedowski, M.7
Meiling, H.8
Klein, R.9
Thornagel, R.10
Scholze, F.11
Ulm, G.12
Kurt, R.13
Zalm, P.14
Louis, E.15
Yakshin, A.16
-
24
-
-
62749117450
-
-
Springer, New York p. 7
-
Kozlova G.V., Smirnova T.G., Molchanova V.P., and Tubyshkina Z.A. Metal Science and Heat Treatment vol. 4 (2004), Springer, New York p. 7
-
(2004)
Metal Science and Heat Treatment
, vol.4
-
-
Kozlova, G.V.1
Smirnova, T.G.2
Molchanova, V.P.3
Tubyshkina, Z.A.4
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